Stepper 3 (ASML DUV): Revision history

20 August 2023

• curprev 18:1418:14, 20 August 2023‎ John d talk contribs‎ 9,839 bytes +84‎ →‎Process Information: added maximu. Dose & disallowed EVL PR’s Tag: Visual edit
• curprev 18:0818:08, 20 August 2023‎ John d talk contribs‎ 9,755 bytes +177‎ Added KrF and some more info on piece part, and removed unnecessary heading Tag: Visual edit

7 August 2023

• curprev 19:5019:50, 7 August 2023‎ John d talk contribs‎ 9,578 bytes +119‎ added minimum wafer thickness Tag: Visual edit

25 May 2023

• curprev 18:3318:33, 25 May 2023‎ John d talk contribs‎ 9,459 bytes +118‎ →‎Resists Used: mnetiuon EBL compatibility Tag: Visual edit
• curprev 18:3118:31, 25 May 2023‎ John d talk contribs‎ 9,341 bytes +35‎ →‎About: separated "resist info" to it's own heading Tag: Visual edit

18 May 2023

• curprev 23:4023:40, 18 May 2023‎ John d talk contribs‎ m 9,306 bytes +1‎ →‎Process Control Data Tag: Visual edit
• curprev 23:4023:40, 18 May 2023‎ John d talk contribs‎ m 9,305 bytes −1‎ →‎Process Control Data
• curprev 23:3923:39, 18 May 2023‎ John d talk contribs‎ m 9,306 bytes +254‎ →‎Process Control Data Tag: Visual edit
• curprev 23:3723:37, 18 May 2023‎ John d talk contribs‎ m 9,052 bytes +209‎ →‎Process Control Data: images link to data now
• curprev 23:3523:35, 18 May 2023‎ John d talk contribs‎ 8,843 bytes +360‎ →‎Process Control Data: added example images of Process Control Data Tag: Visual edit: Switched

27 April 2023

• curprev 21:5221:52, 27 April 2023‎ John d talk contribs‎ 8,483 bytes +225‎ →‎Design Tools: CAD files links Tag: Visual edit

16 March 2023

• curprev 17:2717:27, 16 March 2023‎ John d talk contribs‎ 8,258 bytes −8‎ →‎Operating Procedures: moved training procedure above Tag: Visual edit

10 March 2023

• curprev 21:0121:01, 10 March 2023‎ John d talk contribs‎ 8,266 bytes +1,321‎ link to Process Control Data Tag: Visual edit

6 December 2022

• curprev 18:1918:19, 6 December 2022‎ John d talk contribs‎ 6,945 bytes +165‎ →‎Design Tools: note about JobCreator outage Tag: Visual edit

9 November 2022

• curprev 22:1122:11, 9 November 2022‎ John d talk contribs‎ m 6,780 bytes +32‎ →‎Training Procedure Tag: Visual edit
• curprev 22:0722:07, 9 November 2022‎ John d talk contribs‎ 6,748 bytes +497‎ →‎Online Video Trainings: added "training procedure" section Tag: Visual edit

24 August 2022

• curprev 23:1823:18, 24 August 2022‎ John d talk contribs‎ 6,251 bytes +16‎ →‎Operating Procedures Tag: Visual edit

23 March 2022

• curprev 17:2917:29, 23 March 2022‎ John d talk contribs‎ 6,235 bytes +36‎ →‎Design & Fabrication Tools: Changed title to "Design Tools". JobCreator: mention remotely-uploadable, Tag: Visual edit

11 January 2022

• curprev 22:2222:22, 11 January 2022‎ John d talk contribs‎ 6,199 bytes −42‎ →‎Operating Procedures: merged Troubleshooting into Operating Procedures Tag: Visual edit

4 November 2021

• curprev 17:4517:45, 4 November 2021‎ John d talk contribs‎ 6,241 bytes +90‎ →‎Process Information: added Max wafer thickness Tag: Visual edit

7 October 2021

• curprev 16:5416:54, 7 October 2021‎ John d talk contribs‎ m 6,151 bytes 0‎ →‎Design & Fabrication Tools: fix indent Tag: Visual edit: Switched
• curprev 16:5316:53, 7 October 2021‎ John d talk contribs‎ 6,151 bytes +132‎ →‎Operating Procedures: added Mask Making to "Design/Fab tools" Tag: Visual edit

7 September 2021

• curprev 23:1323:13, 7 September 2021‎ John d talk contribs‎ 6,019 bytes +156‎ reorganization Tag: Visual edit

4 September 2021

• curprev 19:5219:52, 4 September 2021‎ Jcrode talk contribs‎ 5,863 bytes −6‎ Text replacement - "/wiki/index.php" to "/w/index.php"
• curprev 19:4819:48, 4 September 2021‎ Jcrode talk contribs‎ 5,869 bytes +12‎ Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

2 June 2021

• curprev 20:3220:32, 2 June 2021‎ John d talk contribs‎ m 5,857 bytes +25‎ added Model field in Tool templ.

23 February 2021

• curprev 14:4614:46, 23 February 2021‎ John d talk contribs‎ 5,832 bytes +109‎ →‎Operating Procedures: link to "ASML Stepper 3 - Substrates smaller than 100mm/4-inch" Tag: Visual edit

3 February 2021

• curprev 00:1800:18, 3 February 2021‎ John d talk contribs‎ 5,723 bytes 0‎ corrected PanOpto video traing link Tag: Visual edit

23 October 2020

• curprev 11:5811:58, 23 October 2020‎ John d talk contribs‎ 5,723 bytes +199‎ →‎Process Information: added low-TTV Tag: Visual edit
• curprev 11:5411:54, 23 October 2020‎ John d talk contribs‎ 5,524 bytes +104‎ →‎Online Video Trainings: added Video Training part 1 Tag: Visual edit

25 September 2020

• curprev 22:5122:51, 25 September 2020‎ John d talk contribs‎ m 5,420 bytes +94‎ →‎Online Video Trainings: disclaimer about supervisor training Tag: Visual edit
• curprev 22:4822:48, 25 September 2020‎ John d talk contribs‎ 5,326 bytes +299‎ →‎Operating Procedures: added Video Training: Part 2 Tag: Visual edit

5 July 2020

• curprev 23:3523:35, 5 July 2020‎ John d talk contribs‎ m 5,027 bytes +174‎ →‎Operating Procedures: link to FEM sub-section Tag: Visual edit

17 June 2020

• curprev 20:3820:38, 17 June 2020‎ John d talk contribs‎ m 4,853 bytes +14‎ →‎Recipes: corrected link text Tag: Visual edit
• curprev 20:3720:37, 17 June 2020‎ John d talk contribs‎ 4,839 bytes +252‎ →‎Design & Fabrication Tools: updated Job-creator options Tag: Visual edit

7 May 2020

• curprev 03:4003:40, 7 May 2020‎ John d talk contribs‎ m 4,587 bytes +8‎ reduce Heading levels to "heading" not "Page title" Tag: Visual edit
• curprev 00:5500:55, 7 May 2020‎ John d talk contribs‎ 4,579 bytes +341‎ added link to stepper recipes Tag: Visual edit

7 April 2020

• curprev 01:3401:34, 7 April 2020‎ Jcrode talk contribs‎ 4,238 bytes +4‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

4 April 2020

• curprev 19:4519:45, 4 April 2020‎ John d talk contribs‎ 4,234 bytes +148‎ →‎Design & Fabrication Tools: link to template + CAD files Tag: Visual edit

18 January 2020

• curprev 20:5520:55, 18 January 2020‎ John d talk contribs‎ m 4,086 bytes +4‎ →‎Design & Fabrication Tools: link to github repo Tag: Visual edit
• curprev 20:5520:55, 18 January 2020‎ John d talk contribs‎ 4,082 bytes +10‎ moved UCSB Test reticles to "Design & Fabrication Tools" section Tag: Visual edit: Switched
• curprev 20:5320:53, 18 January 2020‎ John d talk contribs‎ 4,072 bytes +198‎ moved Mask Making Guidelines to "Design Tools" section Tag: Visual edit

19 December 2019

• curprev 17:2217:22, 19 December 2019‎ John d talk contribs‎ 3,874 bytes +454‎ →‎Operating Procedures: added Software options section Tag: Visual edit

22 November 2019

• curprev 00:3400:34, 22 November 2019‎ John d talk contribs‎ m 3,420 bytes +79‎ moved/updated "service provider" Tag: Visual edit

8 October 2019

• curprev 23:1823:18, 8 October 2019‎ John d talk contribs‎ m 3,341 bytes +56‎ →‎Troubleshooting and Recovery: minor grammar Tag: Visual edit
• curprev 23:1723:17, 8 October 2019‎ John d talk contribs‎ m 3,285 bytes +67‎ toolTemplate added Litho links

18 July 2019

• curprev 19:2919:29, 18 July 2019‎ John d talk contribs‎ 3,218 bytes −2‎ changes supervisor to Demis
• curprev 19:2719:27, 18 July 2019‎ John d talk contribs‎ m 3,220 bytes −51‎ corrected supervisor template

12 June 2019

• curprev 15:4215:42, 12 June 2019‎ John d talk contribs‎ m 3,271 bytes +98‎ Indicated that FEM is in SOP Tag: Visual edit

5 March 2019

• curprev 23:2323:23, 5 March 2019‎ John d talk contribs‎ 3,173 bytes +238‎ →‎Process Information: expand recipes text, added wafer size Tag: Visual edit