Vacuum Deposition Recipes: Revision history

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curprev 22:4422:44, 7 July 2022 John d talk contribs m 24,066 bytes +17 →Process Control Data: smaller font Tag: Visual edit
curprev 22:4422:44, 7 July 2022 John d talk contribs 24,049 bytes +157 →Deposition Tools/Materials Table: removed tempalte for smaller table explanation Tag: Visual edit

curprev 22:5522:55, 8 June 2022 John d talk contribs 23,892 bytes +412 link to process control data Tag: Visual edit

curprev 19:5019:50, 4 September 2021 Jcrode talk contribs 23,384 bytes −18 Text replacement - "/wiki/index.php" to "/w/index.php"
curprev 19:4819:48, 4 September 2021 Jcrode talk contribs 23,402 bytes +36 Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

curprev 18:3018:30, 17 June 2021 John d talk contribs m 23,366 bytes 0 changed IBD SiON A --> R Tag: Visual edit

curprev 20:2420:24, 2 June 2021 John d talk contribs m 23,366 bytes +35 BG color of "SiN- Low stress"

curprev 17:4917:49, 12 January 2021 John d talk contribs m 23,331 bytes 0 SPutt4: Ru: A-->R Tag: Visual edit
curprev 17:4817:48, 12 January 2021 John d talk contribs 23,331 bytes +50 added link to APutter 4 : Ru ("A") Tag: Visual edit

curprev 01:0001:00, 2 July 2020 John d talk contribs 23,281 bytes +177 Corrected Unaxis Dep links. New row: low-stress Nitride. Tag: Visual edit

curprev 01:3001:30, 7 April 2020 Jcrode talk contribs 23,104 bytes +6 Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

curprev 04:2804:28, 17 September 2019 Thibeault talk contribs 23,098 bytes −3,952 Delete Sputter1 and 2 Tag: Visual edit

curprev 23:3423:34, 19 July 2019 John d talk contribs 27,050 bytes −12 corrected PECVD2 a-Si link Tag: Visual edit

curprev 01:1501:15, 30 November 2018 John d talk contribs m 27,062 bytes +74 fixed AJA3 Cr link Tag: Visual edit

curprev 14:0414:04, 16 July 2018 John d talk contribs m 26,988 bytes +74 link to sputter 5 section Tag: Visual edit

curprev 16:0916:09, 9 July 2018 John d talk contribs 26,914 bytes +74 sputt4 link to TiN - recipes table Tag: Visual edit

curprev 16:5416:54, 25 May 2018 Thibeault talk contribs 26,840 bytes −30 minor link edit sputter5 Tag: Visual edit
curprev 16:5216:52, 25 May 2018 Thibeault talk contribs m 26,870 bytes +19 link to sputter5 recipes Tag: Visual edit

curprev 23:4923:49, 14 May 2018 Thibeault talk contribs 26,851 bytes +147 Fixed ALD Links to proper headings Tag: Visual edit
curprev 23:4423:44, 14 May 2018 Thibeault talk contribs 26,704 bytes +10 Pt ALD link Tag: Visual edit

curprev 21:1221:12, 1 May 2018 Bosch t talk contribs 26,694 bytes +8 No edit summary Tag: Visual edit
curprev 21:0921:09, 1 May 2018 Bosch t talk contribs 26,686 bytes −46 Updated to "new" sputter 5 link Tag: Visual edit

curprev 21:0621:06, 16 March 2018 John d talk contribs 26,732 bytes +32 IBD Al2O3 "R" link Tag: Visual edit

curprev 03:3303:33, 14 March 2018 John d talk contribs m 26,700 bytes −9 removed 'sortable' tag Tag: Visual edit
curprev 00:4000:40, 14 March 2018 John d talk contribs 26,709 bytes +71 fixed IBD SiOn link Tag: Visual edit
curprev 00:3900:39, 14 March 2018 John d talk contribs 26,638 bytes −38 IBD SiOxNy link Tag: Visual edit
curprev 00:3200:32, 14 March 2018 John d talk contribs 26,676 bytes +9 make table sortable Tag: Visual edit

curprev 01:4001:40, 7 February 2018 John d talk contribs 26,667 bytes +57 added "R" for Sput4 Al & Al2O3 Tag: Visual edit: Switched

curprev 06:4206:42, 16 November 2017 John d talk contribs m 26,610 bytes +248 added IBD "A" recipes for all target metals (Si, Ti, Al, Ta). Tag: Visual edit

curprev 21:4121:41, 31 October 2017 John d talk contribs 26,362 bytes 0 fixed C bgcolor color

curprev 00:0100:01, 22 September 2017 Thibeault talk contribs m 26,362 bytes −25 No edit summary Tag: Visual edit
curprev 00:0100:01, 22 September 2017 Thibeault talk contribs m 26,387 bytes −50 No edit summary Tag: Visual edit

curprev 15:4815:48, 19 September 2017 John d talk contribs 26,437 bytes 0 fix row color?
curprev 15:4615:46, 19 September 2017 John d talk contribs 26,437 bytes +657 fixed table row color
curprev 15:4215:42, 19 September 2017 John d talk contribs 25,780 bytes +517 Added Carbon on EBeam #1 Tag: Visual edit: Switched

curprev 18:1018:10, 8 September 2017 Thibeault talk contribs m 25,263 bytes 0 No edit summary Tag: Visual edit: Switched

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