Plasma Clean (YES EcoClean): Revision history

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curprev 15:5415:54, 28 May 2024‎ Sawyer l talk contribs‎ 3,282 bytes −1‎ SOP Rev Tag: Visual edit

curprev 19:3119:31, 22 November 2023‎ John d talk contribs‎ 3,283 bytes +237‎ →‎Etch Method: mentioned back of wafer exposure to gas Tag: Visual edit

curprev 20:3820:38, 21 November 2023‎ John d talk contribs‎ 3,046 bytes +704‎ images of carrier wafers Tag: Visual edit

curprev 23:4423:44, 16 November 2023‎ John d talk contribs‎ 2,342 bytes +125‎ →‎Recipes: preview of recipes page. Tag: Visual edit

curprev 18:3118:31, 8 February 2023‎ Sawyer l talk contribs‎ 2,217 bytes −6‎ SOP rev (minor) Tag: Visual edit

curprev 17:5017:50, 30 August 2022‎ Silva talk contribs‎ 2,223 bytes +24‎ No edit summary

curprev 17:2217:22, 23 June 2021‎ John d talk contribs‎ 2,199 bytes +904‎ added etch method & applications Tag: Visual edit

curprev 16:2316:23, 2 October 2020‎ Sawyer l talk contribs‎ 1,295 bytes −3‎ updated SOP link Tag: Visual edit

curprev 01:3501:35, 7 April 2020‎ Jcrode talk contribs‎ 1,298 bytes +1‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

curprev 19:1819:18, 26 February 2020‎ Sawyer l talk contribs‎ 1,297 bytes −153‎ No edit summary
curprev 19:1419:14, 26 February 2020‎ Sawyer l talk contribs‎ 1,450 bytes +47‎ No edit summary

curprev 17:1817:18, 5 November 2019‎ Sawyer l talk contribs‎ 1,403 bytes +6‎ updated SOP linked Tag: Visual edit

curprev 17:1817:18, 17 October 2019‎ Sawyer l talk contribs‎ 1,397 bytes +3‎ No edit summary Tag: Visual edit
curprev 17:1717:17, 17 October 2019‎ Sawyer l talk contribs‎ 1,394 bytes +49‎ updated contact info Tag: Visual edit
curprev 17:1517:15, 17 October 2019‎ Sawyer l talk contribs‎ 1,345 bytes −13‎ No edit summary
curprev 17:1517:15, 17 October 2019‎ Sawyer l talk contribs‎ 1,358 bytes +13‎ No edit summary

curprev 16:3916:39, 25 September 2019‎ John d talk contribs‎ m 1,345 bytes 0‎ John d moved page Plamsa Clean (YES EcoClean) to Plasma Clean (YES EcoClean) without leaving a redirect: spelling
curprev 14:5914:59, 25 September 2019‎ Sawyer l talk contribs‎ 1,345 bytes +58‎ Added doc section and linked SOP Tag: Visual edit
curprev 14:5714:57, 25 September 2019‎ Sawyer l talk contribs‎ 1,287 bytes +79‎ No edit summary Tag: Visual edit: Switched

curprev 20:4420:44, 20 September 2019‎ Thibeault talk contribs‎ 1,208 bytes +35‎ No edit summary
curprev 20:4120:41, 20 September 2019‎ Thibeault talk contribs‎ 1,173 bytes +199‎ added links Tag: Visual edit

curprev 04:0404:04, 17 September 2019‎ Thibeault talk contribs‎ 974 bytes +974‎ Created page with "{{tool|{{PAGENAME}} |picture=YES_EcoClean.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 5 |email=silva@ece.ucsb.edu |description = EcoClean As..."

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