Process Group - Process Control Data: Revision history

21 September 2026

• curprev 19:4419:44, 21 September 2026 John d talk contribs 21,011 bytes +67 →Ion Beam Sputter Deposition (Veeco Nexus) - Process Control: fixed old data link Tag: Visual edit

31 August 2026

• curprev 17:4217:42, 31 August 2026 John d talk contribs m 20,944 bytes −10 →Si Etching (FL-ICP Process Control) Tag: Visual edit

11 August 2026

• curprev 17:4817:48, 11 August 2026 John d talk contribs 20,954 bytes +9 →Maskless Aligner (Heidelberg MLA150) - Process Control: added by SEM Tag: Visual edit
• curprev 17:4317:43, 11 August 2026 John d talk contribs 20,945 bytes +67 →Maskless Aligner (Heidelberg MLA150) - Process Control: updated best res definition Tag: Visual edit
• curprev 16:5116:51, 11 August 2026 John d talk contribs m 20,878 bytes +92 No edit summary Tag: Visual edit
• curprev 16:4916:49, 11 August 2026 John d talk contribs 20,786 bytes +649 added MLA lithocals to wiki Tag: Visual edit

12 February 2026

• curprev 01:4501:45, 12 February 2026 John d talk contribs 20,137 bytes +30 disabled links on example plot images via `|link=`
• curprev 01:4101:41, 12 February 2026 John d talk contribs 20,107 bytes +522 →Sputter 5 (AJA ATC 2200-V) - Process Control: added sputter and EBeam4 example SPC chart screenshots Tag: Visual edit

25 September 2025

• curprev 21:3521:35, 25 September 2025 Noahdutra talk contribs 19,585 bytes −9 →Unaxis VLR Etch - Process Control Tag: Visual edit

21 August 2025

• curprev 17:4917:49, 21 August 2025 Noahdutra talk contribs 19,594 bytes +4 →Sputter 5: Ti: corrected Sputter 5 plots link Tag: Visual edit
• curprev 17:4717:47, 21 August 2025 Noahdutra talk contribs 19,590 bytes +932 Added sputter 5 control data Tag: Visual edit

14 August 2025

• curprev 17:2717:27, 14 August 2025 Noahdutra talk contribs 18,658 bytes −6 →GaAs Etch with N2/Cl2 - Process Control Data (Panasonic 2): error happened last time Tag: Visual edit
• curprev 17:2617:26, 14 August 2025 Noahdutra talk contribs 18,664 bytes +877 →Panasonic ICP#2 - Process Control: added ICP2 GaAs to Process control Tag: Visual edit

13 August 2025

• curprev 19:2719:27, 13 August 2025 Noahdutra talk contribs 17,787 bytes +38 →NEW Std InP Ridge Etch Cl2/H2/Ar/200°C: Taking away NEW/OLD labels on InP etches Tag: Visual edit

12 August 2025

• curprev 23:5523:55, 12 August 2025 Noahdutra talk contribs 17,749 bytes +124 →NEW Std InP Ridge Etch Cl2/H2/Ar/200°C
• curprev 23:5423:54, 12 August 2025 Noahdutra talk contribs 17,625 bytes −129 →NEW Std InP Ridge Etch Cl2/H2/Ar/200°C Tag: Visual edit
• curprev 23:5323:53, 12 August 2025 Noahdutra talk contribs 17,754 bytes +969 →InP Ridge Etch: Cl2/CH4/H2/60°C: adding 200C InP for OXFD Tag: Visual edit

21 May 2025

• curprev 18:3418:34, 21 May 2025 John d talk contribs 16,785 bytes +234 →E-Beam 4 (CHA): renamed section to include "Process Control" in header title Tag: Visual edit
• curprev 18:2918:29, 21 May 2025 John d talk contribs 16,551 bytes +371 →Deposition, Metal (Process Control Data): added all eBeam 1 data + plots Tag: Visual edit
• curprev 17:5617:56, 21 May 2025 John d talk contribs 16,180 bytes +753 linked to EB-eam #1 sheets - plots not ready yet Tag: Visual edit

29 April 2025

• curprev 18:3118:31, 29 April 2025 John d talk contribs 15,427 bytes +62 →Si Etching (FL-ICP Process Control): link to recipe data Tag: Visual edit

13 March 2025

• curprev 00:1200:12, 13 March 2025 John d talk contribs 15,365 bytes +15 →Oxford PlasmaPro Cobra Etcher: fixed InP cobra links Tag: Visual edit

5 March 2025

• curprev 17:5217:52, 5 March 2025 John d talk contribs 15,350 bytes +32 →E-Beam 4 (CHA): made subheadings for each metal Tag: Visual edit

28 February 2025

• curprev 18:3518:35, 28 February 2025 John d talk contribs 15,318 bytes +1,373 Added EBeam-4 cals Tag: Visual edit

7 February 2025

• curprev 00:5400:54, 7 February 2025 John d talk contribs m 13,945 bytes +34 →Deposition (Process Control Data) Tag: Visual edit
• curprev 00:5100:51, 7 February 2025 John d talk contribs 13,911 bytes +475 →Deposition (Process Control Data): added screenshots of SPC charts and data Tag: Visual edit: Switched

13 January 2025

• curprev 03:5403:54, 13 January 2025 John d talk contribs m 13,436 bytes −6 →PlasmaTherm DSEIII Deep Silicon Etcher: rmeoved bold Tag: Visual edit

27 November 2024

• curprev 22:5722:57, 27 November 2024 Noahdutra talk contribs 13,442 bytes +46 →GaN Etch (Cl2/BCl3/Ar/200°C): Added recipe name for public GaN etch Tag: Visual edit
• curprev 21:2021:20, 27 November 2024 Noahdutra talk contribs 13,396 bytes −102 →GaN Etch (Cl2/BCl3/Ar/200°C) Tag: Visual edit
• curprev 21:1921:19, 27 November 2024 Noahdutra talk contribs 13,498 bytes +170 →GaN Etch (Cl2/BCl3/Ar/200°C)
• curprev 21:1021:10, 27 November 2024 Noahdutra talk contribs 13,328 bytes +465 →GaN Etch (Cl2/BCl3/Ar/200°C): Added things to GaN etch SPC Tag: Visual edit

7 November 2024

• curprev 18:0418:04, 7 November 2024 John d talk contribs 12,863 bytes +416 added GaN etch cal →Oxford PlasmaPro Cobra Etcher

6 November 2024

• curprev 21:4721:47, 6 November 2024 John d talk contribs 12,447 bytes +1,010 →Etching (Process Control Data): pasted process control data link/image from DSE recipes page Tag: Visual edit
• curprev 21:4221:42, 6 November 2024 John d talk contribs m 11,437 bytes +242 →PlasmaTherm SLR Fluorine Etcher: subscripts in chemicals Tag: Visual edit
• curprev 21:3821:38, 6 November 2024 John d talk contribs 11,195 bytes +351 describe purpose of 2 diff EtchCals Tag: Visual edit

13 September 2024

• curprev 21:3921:39, 13 September 2024 John d talk contribs 10,844 bytes +1,029 →PlasmaTherm SLR Fluorine Etcher: added Si etch cal Tag: Visual edit: Switched

24 April 2024

• curprev 19:0319:03, 24 April 2024 John d talk contribs 9,815 bytes +2 Moved litho to the bottom since it's updated less often Tag: Visual edit: Switched

15 August 2023

• curprev 17:0417:04, 15 August 2023 John d talk contribs 9,813 bytes +134 move TOC below intro Tag: Visual edit: Switched
• curprev 17:0317:03, 15 August 2023 John d talk contribs 9,679 bytes +139 description of process control data

18 May 2023

• curprev 23:4123:41, 18 May 2023 John d talk contribs 9,540 bytes +813 →Stepper #3 (ASML DUV): included example images

10 March 2023

• curprev 21:0721:07, 10 March 2023 John d talk contribs m 8,727 bytes +45 Litho to Top of page, link to ASML recipes page
• curprev 21:0421:04, 10 March 2023 John d talk contribs 8,682 bytes +738 New Litho section + Stepper3 ASML section with links to process control data Tag: Visual edit: Switched

20 January 2023

• curprev 19:5619:56, 20 January 2023 John d talk contribs 7,944 bytes +157 increased all heading levels to get HR's between Dep/Etch sections Tag: Visual edit: Switched
• curprev 19:5019:50, 20 January 2023 John d talk contribs 7,787 bytes +969 →Oxford PlasmaPro Cobra Etcher: link to new Google sheets data (ND's) Tag: Visual edit: Switched
• curprev 19:3919:39, 20 January 2023 John d talk contribs 6,818 bytes +713 →Panasonic ICP#2: lins to new google sheets data Tag: Visual edit: Switched
• curprev 19:2919:29, 20 January 2023 John d talk contribs m 6,105 bytes −2 →Panasonic ICP #1
• curprev 19:2819:28, 20 January 2023 John d talk contribs 6,107 bytes +1,189 →Etching (Process Control Data): FL-ICP example chart with link to live charts Tag: Visual edit: Switched
• curprev 19:0919:09, 20 January 2023 John d talk contribs 4,918 bytes +29 →Etching (Process Control Data): formatted OLD data Tag: Visual edit
• curprev 19:0019:00, 20 January 2023 John d talk contribs m 4,889 bytes −61 →PlasmaTherm SLR Fluorine Etcher: fixed link to plot Tag: Visual edit
• curprev 18:4618:46, 20 January 2023 John d talk contribs 4,950 bytes +411 →Etching (Process Control Data): link to FL-ICP google sheets (noahD) Tag: Visual edit