Sputtering Recipes: Revision history

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curprev 18:0518:05, 19 August 2024‎ Thibeault talk contribs‎ 16,874 bytes +86‎ →‎Materials Table (Sputter 5) Tag: Visual edit

curprev 18:3318:33, 9 July 2024‎ John d talk contribs‎ 16,788 bytes +238‎ →‎SiO2 Uniformity: added table of stats Tag: Visual edit
curprev 18:2618:26, 9 July 2024‎ John d talk contribs‎ 16,550 bytes +337‎ →‎Ion Beam Deposition (Veeco NEXUS): Added plot of Sio2 uniformity Tag: Visual edit

curprev 04:3604:36, 22 September 2023‎ John d talk contribs‎ 16,213 bytes +145‎ →‎Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit

curprev 00:0700:07, 9 August 2023‎ John d talk contribs‎ 16,068 bytes +443‎ added Sputter 3 ignition issues Tag: Visual edit

curprev 01:4401:44, 16 November 2022‎ John d talk contribs‎ 15,625 bytes −553‎ →‎Ion Beam Deposition (Veeco NEXUS): fixed links to Historical Data fro SiO/TaO Tag: Visual edit

curprev 18:5918:59, 3 August 2022‎ John d talk contribs‎ 16,178 bytes +8‎ →‎Materials Table (Sputter 3): specified Tilt is in mm, since tool has both In & mm listed. Tag: Visual edit
curprev 18:5818:58, 3 August 2022‎ John d talk contribs‎ 16,170 bytes −18‎ →‎Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
curprev 18:5718:57, 3 August 2022‎ John d talk contribs‎ 16,188 bytes +54‎ →‎Sputter 4 (AJA ATC 2200-V): updated Au to 200W dep rate Tag: Visual edit

curprev 00:1800:18, 11 May 2022‎ John d talk contribs‎ m 16,134 bytes −6‎ →‎Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit
curprev 00:1800:18, 11 May 2022‎ John d talk contribs‎ 16,140 bytes −2‎ →‎Ion Beam Deposition (Veeco NEXUS): changed style to Page Title Tag: Visual edit
curprev 00:1600:16, 11 May 2022‎ John d talk contribs‎ m 16,142 bytes +71‎ minor updates Tag: Visual edit
curprev 00:0600:06, 11 May 2022‎ John d talk contribs‎ 16,071 bytes +30‎ →‎Ion Beam Deposition (Veeco NEXUS): rename process control plots for clarity Tag: Visual edit

curprev 06:0806:08, 5 January 2022‎ John d talk contribs‎ m 16,041 bytes +6‎ →‎Ion Beam Deposition (Veeco NEXUS): credit Demis for the data Tag: Visual edit

curprev 07:1907:19, 16 December 2021‎ John d talk contribs‎ 16,035 bytes −424‎ →‎Ion Beam Deposition (Veeco NEXUS): deleted IBD Cals spreadsheet Tag: Visual edit
curprev 07:1107:11, 16 December 2021‎ John d talk contribs‎ 16,459 bytes −613‎ →‎Ion Beam Deposition (Veeco NEXUS): pasted Nastazia M's new data

curprev 01:3201:32, 17 April 2021‎ John d talk contribs‎ 16,863 bytes +364‎ →‎Sputter 3 (AJA ATC 2000-F): Reduced Heading Levels below "Page Title" Tag: Visual edit

curprev 17:4717:47, 12 January 2021‎ John d talk contribs‎ 16,499 bytes +351‎ →‎Sputter 4 (AJA ATC 2200-V): added Ru ; link to SiO2 Etching with Ruthenium Hardmask doc. Tag: Visual edit
curprev 17:4017:40, 12 January 2021‎ John d talk contribs‎ 16,148 bytes +67‎ →‎Sputter 4 (AJA ATC 2200-V): added Ru Tag: Visual edit

curprev 16:5816:58, 23 April 2020‎ John d talk contribs‎ 16,081 bytes −3‎ →‎Al Deposition (Sputter 2): changed Heading level for Sputter 2 to "page title" to match others Tag: Visual edit

curprev 01:3401:34, 7 April 2020‎ Jcrode talk contribs‎ 16,084 bytes +24‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

curprev 04:3304:33, 17 September 2019‎ Thibeault talk contribs‎ 16,060 bytes −453‎ Take Sputter 2 off of TOC list,but keep recipes on page at bottom Tag: Visual edit
curprev 04:3104:31, 17 September 2019‎ Thibeault talk contribs‎ 16,513 bytes 0‎ No edit summary

curprev 21:2621:26, 20 March 2019‎ Ningcao talk contribs‎ 16,513 bytes +1‎ →‎Sputter 3 (AJA ATC 2000-F)
curprev 21:2521:25, 20 March 2019‎ Ningcao talk contribs‎ 16,512 bytes +2‎ →‎Sputter 3 (AJA ATC 2000-F)

curprev 17:3217:32, 5 September 2018‎ John d talk contribs‎ 16,510 bytes +166‎ →‎Sputter 3 (AJA ATC 2000-F): Added Au lower limit Tag: Visual edit
curprev 17:2717:27, 5 September 2018‎ John d talk contribs‎ 16,344 bytes +20‎ →‎Sputter 2 (SFI Endeavor): corrected - tool disabled, not removed yet Tag: Visual edit
curprev 17:2517:25, 5 September 2018‎ John d talk contribs‎ 16,324 bytes +129‎ →‎Sputter 2 (SFI Endeavor): disclaimer that the tool has been removed Tag: Visual edit
curprev 17:2317:23, 5 September 2018‎ John d talk contribs‎ m 16,195 bytes +1‎ moved sputter 2 to the bottom

curprev 14:0614:06, 16 July 2018‎ John d talk contribs‎ m 16,194 bytes −58‎ →‎Sputter 5 (AJA ATC 2200-V): correct signupmonkey link, footnote star Tag: Visual edit

curprev 20:5320:53, 20 June 2018‎ John d talk contribs‎ m 16,252 bytes −1‎ →‎Al2O3 deposition (IBD): AlOx recipe name Tag: Visual edit

curprev 22:1022:10, 12 June 2018‎ Ningcao talk contribs‎ 16,253 bytes +16‎ →‎Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
curprev 22:0622:06, 12 June 2018‎ Ningcao talk contribs‎ 16,237 bytes +3‎ →‎Sputter 5 (AJA ATC 2200-V) Tag: Visual edit
curprev 22:0522:05, 12 June 2018‎ Ningcao talk contribs‎ 16,234 bytes +71‎ →‎Sputter 4 (AJA ATC 2200-V): adding Cu deposition (Sputter4) into WiKi Tag: Visual edit
curprev 22:0122:01, 12 June 2018‎ Ningcao talk contribs‎ 16,163 bytes +84‎ adding Al deposition data (Sputter5) into WiKi Tag: Visual edit

curprev 16:4916:49, 25 May 2018‎ Thibeault talk contribs‎ 16,079 bytes −140‎ No edit summary

curprev 20:3320:33, 16 April 2018‎ John d talk contribs‎ 16,219 bytes +37‎ →‎Sputter 4 (AJA ATC 2200-V): added Power Source column Tag: Visual edit
curprev 20:3220:32, 16 April 2018‎ John d talk contribs‎ 16,182 bytes +223‎ →‎Sputter 5 (Lesker AXXIS): link to SUM page for installed targets Tag: Visual edit
curprev 20:3120:31, 16 April 2018‎ John d talk contribs‎ 15,959 bytes +128‎ →‎Sputter 5 (Lesker AXXIS): added Al2O3 and Power SOurce column Tag: Visual edit
curprev 20:2620:26, 16 April 2018‎ John d talk contribs‎ 15,831 bytes −51‎ update comment indicating incorrect title Tag: Visual edit: Switched

curprev 18:4618:46, 14 March 2018‎ Ningcao talk contribs‎ 15,882 bytes −1‎ →‎Sputter 3 (AJA ATC 2000-F)
curprev 18:1918:19, 14 March 2018‎ Ningcao talk contribs‎ 15,883 bytes −7‎ →‎Cu Deposition (Sputter 3)
curprev 18:1918:19, 14 March 2018‎ Ningcao talk contribs‎ 15,890 bytes +27‎ →‎Cu Deposition (Sputter 3)

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