Stepper 3 (ASML DUV): Revision history

26 October 2024

• curprev 19:2619:26, 26 October 2024‎ John d talk contribs‎ 10,166 bytes +339‎ →‎Recipes: added FEM analysis link Tag: Visual edit
• curprev 18:4218:42, 26 October 2024‎ John d talk contribs‎ 9,827 bytes +152‎ →‎Operating Procedures: moved login issue to new page. Tag: Visual edit

20 September 2024

• curprev 18:4018:40, 20 September 2024‎ John d talk contribs‎ 9,675 bytes +188‎ →‎About: link to stepper tutorial, fixed mask making guidelines link Tag: Visual edit

19 July 2024

• curprev 19:3319:33, 19 July 2024‎ John d talk contribs‎ m 9,487 bytes −1‎ →‎Design Tools Tag: Visual edit
• curprev 19:3319:33, 19 July 2024‎ John d talk contribs‎ 9,488 bytes +116‎ →‎Design Tools: link to new Generic Stepper programming page. Tag: Visual edit

3 May 2024

• curprev 20:0820:08, 3 May 2024‎ John d talk contribs‎ m 9,372 bytes +1‎ →‎Operating Procedures Tag: Visual edit
• curprev 20:0720:07, 3 May 2024‎ John d talk contribs‎ 9,371 bytes −884‎ →‎Operating Procedures: deleted links to video training, point instead to gDrive doc (access-restricted). Tag: Visual edit
• curprev 19:5919:59, 3 May 2024‎ John d talk contribs‎ 10,255 bytes +268‎ →‎Operating Procedures: updates to wording Tag: Visual edit

10 April 2024

• curprev 00:0000:00, 10 April 2024‎ John d talk contribs‎ m 9,987 bytes +10‎ →‎Operating Procedures Tag: Visual edit

13 March 2024

• curprev 10:2710:27, 13 March 2024‎ John d talk contribs‎ 9,977 bytes −1,261‎ removed Wiki-hosted ASML procedures, linked to gDrive procedures (access restricted) Tag: Visual edit

13 February 2024

• curprev 00:4300:43, 13 February 2024‎ John d talk contribs‎ m 11,238 bytes +7‎ →‎General Capabilities/Overview: fixed link Tag: Visual edit
• curprev 00:4100:41, 13 February 2024‎ John d talk contribs‎ 11,231 bytes +295‎ link to stepper vs. contact litho PPT Tag: Visual edit

22 January 2024

• curprev 20:5820:58, 22 January 2024‎ John d talk contribs‎ 10,936 bytes −203‎ →‎Design Tools: moved JobCreator into software section, highlighted Mask Making page Tag: Visual edit

13 January 2024

• curprev 01:4101:41, 13 January 2024‎ John d talk contribs‎ 11,139 bytes +377‎ →‎Online Video Trainings: updated panopto login instructions Tag: Visual edit

22 December 2023

• curprev 18:2418:24, 22 December 2023‎ John d talk contribs‎ 10,762 bytes +17‎ →‎Process Information: made wafer bow it's own section Tag: Visual edit

1 December 2023

• curprev 17:2817:28, 1 December 2023‎ John d talk contribs‎ m 10,745 bytes +35‎ →‎Process Information: DO NOT RUN wafer with too high bow Tag: Visual edit

29 September 2023

• curprev 21:5121:51, 29 September 2023‎ John d talk contribs‎ 10,710 bytes +321‎ →‎Online Video Trainings: privatized the Video Trianings, note on how to reaquire access. Tag: Visual edit

13 September 2023

• curprev 19:4619:46, 13 September 2023‎ John d talk contribs‎ m 10,389 bytes +4‎ →‎Process Information Tag: Visual edit
• curprev 19:4519:45, 13 September 2023‎ John d talk contribs‎ 10,385 bytes +546‎ →‎Process Information: Updated Wafer Bow requirements Tag: Visual edit

20 August 2023

• curprev 18:1418:14, 20 August 2023‎ John d talk contribs‎ 9,839 bytes +84‎ →‎Process Information: added maximu. Dose & disallowed EVL PR’s Tag: Visual edit
• curprev 18:0818:08, 20 August 2023‎ John d talk contribs‎ 9,755 bytes +177‎ Added KrF and some more info on piece part, and removed unnecessary heading Tag: Visual edit

7 August 2023

• curprev 19:5019:50, 7 August 2023‎ John d talk contribs‎ 9,578 bytes +119‎ added minimum wafer thickness Tag: Visual edit

25 May 2023

• curprev 18:3318:33, 25 May 2023‎ John d talk contribs‎ 9,459 bytes +118‎ →‎Resists Used: mnetiuon EBL compatibility Tag: Visual edit
• curprev 18:3118:31, 25 May 2023‎ John d talk contribs‎ 9,341 bytes +35‎ →‎About: separated "resist info" to it's own heading Tag: Visual edit

18 May 2023

• curprev 23:4023:40, 18 May 2023‎ John d talk contribs‎ m 9,306 bytes +1‎ →‎Process Control Data Tag: Visual edit
• curprev 23:4023:40, 18 May 2023‎ John d talk contribs‎ m 9,305 bytes −1‎ →‎Process Control Data
• curprev 23:3923:39, 18 May 2023‎ John d talk contribs‎ m 9,306 bytes +254‎ →‎Process Control Data Tag: Visual edit
• curprev 23:3723:37, 18 May 2023‎ John d talk contribs‎ m 9,052 bytes +209‎ →‎Process Control Data: images link to data now
• curprev 23:3523:35, 18 May 2023‎ John d talk contribs‎ 8,843 bytes +360‎ →‎Process Control Data: added example images of Process Control Data Tag: Visual edit: Switched

27 April 2023

• curprev 21:5221:52, 27 April 2023‎ John d talk contribs‎ 8,483 bytes +225‎ →‎Design Tools: CAD files links Tag: Visual edit

16 March 2023

• curprev 17:2717:27, 16 March 2023‎ John d talk contribs‎ 8,258 bytes −8‎ →‎Operating Procedures: moved training procedure above Tag: Visual edit

10 March 2023

• curprev 21:0121:01, 10 March 2023‎ John d talk contribs‎ 8,266 bytes +1,321‎ link to Process Control Data Tag: Visual edit

6 December 2022

• curprev 18:1918:19, 6 December 2022‎ John d talk contribs‎ 6,945 bytes +165‎ →‎Design Tools: note about JobCreator outage Tag: Visual edit

9 November 2022

• curprev 22:1122:11, 9 November 2022‎ John d talk contribs‎ m 6,780 bytes +32‎ →‎Training Procedure Tag: Visual edit
• curprev 22:0722:07, 9 November 2022‎ John d talk contribs‎ 6,748 bytes +497‎ →‎Online Video Trainings: added "training procedure" section Tag: Visual edit

24 August 2022

• curprev 23:1823:18, 24 August 2022‎ John d talk contribs‎ 6,251 bytes +16‎ →‎Operating Procedures Tag: Visual edit

23 March 2022

• curprev 17:2917:29, 23 March 2022‎ John d talk contribs‎ 6,235 bytes +36‎ →‎Design & Fabrication Tools: Changed title to "Design Tools". JobCreator: mention remotely-uploadable, Tag: Visual edit

11 January 2022

• curprev 22:2222:22, 11 January 2022‎ John d talk contribs‎ 6,199 bytes −42‎ →‎Operating Procedures: merged Troubleshooting into Operating Procedures Tag: Visual edit

4 November 2021

• curprev 17:4517:45, 4 November 2021‎ John d talk contribs‎ 6,241 bytes +90‎ →‎Process Information: added Max wafer thickness Tag: Visual edit

7 October 2021

• curprev 16:5416:54, 7 October 2021‎ John d talk contribs‎ m 6,151 bytes 0‎ →‎Design & Fabrication Tools: fix indent Tag: Visual edit: Switched
• curprev 16:5316:53, 7 October 2021‎ John d talk contribs‎ 6,151 bytes +132‎ →‎Operating Procedures: added Mask Making to "Design/Fab tools" Tag: Visual edit

7 September 2021

• curprev 23:1323:13, 7 September 2021‎ John d talk contribs‎ 6,019 bytes +156‎ reorganization Tag: Visual edit

4 September 2021

• curprev 19:5219:52, 4 September 2021‎ Jcrode talk contribs‎ 5,863 bytes −6‎ Text replacement - "/wiki/index.php" to "/w/index.php"
• curprev 19:4819:48, 4 September 2021‎ Jcrode talk contribs‎ 5,869 bytes +12‎ Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

2 June 2021

• curprev 20:3220:32, 2 June 2021‎ John d talk contribs‎ m 5,857 bytes +25‎ added Model field in Tool templ.

23 February 2021

• curprev 14:4614:46, 23 February 2021‎ John d talk contribs‎ 5,832 bytes +109‎ →‎Operating Procedures: link to "ASML Stepper 3 - Substrates smaller than 100mm/4-inch" Tag: Visual edit

3 February 2021

• curprev 00:1800:18, 3 February 2021‎ John d talk contribs‎ 5,723 bytes 0‎ corrected PanOpto video traing link Tag: Visual edit

23 October 2020

• curprev 11:5811:58, 23 October 2020‎ John d talk contribs‎ 5,723 bytes +199‎ →‎Process Information: added low-TTV Tag: Visual edit
• curprev 11:5411:54, 23 October 2020‎ John d talk contribs‎ 5,524 bytes +104‎ →‎Online Video Trainings: added Video Training part 1 Tag: Visual edit

25 September 2020

• curprev 22:5122:51, 25 September 2020‎ John d talk contribs‎ m 5,420 bytes +94‎ →‎Online Video Trainings: disclaimer about supervisor training Tag: Visual edit