Inspection, Test and Characterization: Difference between revisions
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Created page with "Currently the Nanofab has the following '''{{PAGENAME}}''' tools. Please click on the tool for more information. * Field Emission SEM 1 * Field Emission SEM 2 * [[Step Pā¦" |
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Revision as of 14:25, 27 June 2012
Currently the Nanofab has the following Inspection, Test and Characterization tools. Please click on the tool for more information.
- Field Emission SEM 1
- Field Emission SEM 2
- Step Profile
- Step Profilometer
- Ellipsometer
- Microscopes
- Probe Station & Curve Tracer
- Optical Film Thickness (Filmetrics)
- Scanning Probe Microscope
- Tencor Flexus Film Stress
- Optical Film Thickness (Nanometric)
- SEM Sample Coater
- Surface Analysis
- Photo-emission & IR Microscope
- Ellipsometer (Woollam)
- Goniometer
- 4-Point Probe Resistivity Mapper