Tool List

Tool Categories Lithography Deposition Dry Etch Wet Process Thermal Process Packaging/Bonding Metrology/Test

Lithography

Photoresists and Lithography Chemicals See the Chemical Datasheets page. Auto. Coat/Develop (S-Cubed Flexi) Contact Aligners (Optical Exposure) Contact Aligners (SUSS MJB-3) Contact Aligner (SUSS MA-6) DUV Flood Expose Direct-Write Lithography E-Beam Lithography System (Raith EBPG 5150+) E-Beam Lithography (Nabity v9) Focused Ion-Beam Lithography (Raith Velion) Maskless Aligner (Heidelberg MLA150) Maskless Aligner (Raith PicoMaster XF) Other Patterning Systems Holographic Litho/PL Setup (Custom)

Steppers (Optical Exposure) Stepper 2 (AutoStep 200, i-line) Stepper 3 (ASML DUV, Deep-UV) Thermal Processing for Photolithography Ovens - Overview of all lab ovens Ovens 1, 2 & 3 (Labline) Oven 4 (Fisher) Oven 5 (Labline) High Temp Oven (Blue M) Lithography Support The Spinner Benches have pre-set hotplates at various temperatures appropriate for common photoresist bakes. POLOS spinners on Develop and Solvent benches Spin/Rinse/Dryer

Vacuum Deposition

Physical Vapor Deposition (PVD) Thermal Evaporation E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) E-Beam 5 (Plasys) Thermal Evap 1 Thermal Evap 2 (Solder) Sputter Deposition Sputter 3 (AJA ATC 2000-F) Sputter 4 (AJA ATC 2200-V) Sputter 5 (AJA ATC 2200-V) Ion Beam Deposition (Veeco NEXUS) SEM Sample Coater (Hummer)

Chemical Vapor Deposition (CVD) PECVD 1 (PlasmaTherm 790) PECVD 2 (Advanced Vacuum) ICP-PECVD (Unaxis VLR) Molecular Vapor Deposition Atomic Layer Deposition (Oxford FlexAL)

Dry Etch

Reactive Ion Etching (RIE) RIE 2 (MRC) RIE 5 (PlasmaTherm) Plasma Etching and Cleaning Plasma Clean (YES EcoClean) Plasma Activation (EVG 810) Ashers (Technics PEII) Etch Monitoring Laser Etch Monitoring (Endpoint Detection) Optical Emission Spectra Residual Gas Analyzer (RGA)

ICP-RIE ICP Etch 2 (Panasonic E626I) Oxford ICP Etcher (PlasmaPro 100 Cobra) Fluorine ICP (PlasmaTherm/SLR Fluorine Etcher) Plasma-Therm DSE-iii (PlasmaTherm/Deep Silicon Etcher) Ion Milling and Reactive Ion Beam Etching CAIBE (Oxford Ion Mill) Focused Ion-Beam Lithography (Raith Velion) Other Dry Etching UV Ozone Reactor XeF2 Etch (Xetch) Vapor HF Etch

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Wet Benches Solvent Cleaning Benches Spin Coat Benches Develop Benches Toxic Corrosive Benches Wafer Toxic Corrosive Bench HF/TMAH Processing Benches Plating Bench

Gold Plating Bench (Semcon) Spin Rinse Dryer (SemiTool) Chemical-Mechanical Polisher (Logitech) Mechanical Polisher (Allied) Auto. Coat/Develop (S-Cubed Flexi) Auto. Wet-Processing Spinners (POLOS)

Thermal Processing

Rapid Thermal Annealer/Processor "RTA" (AET RX6) Rapid Thermal Processor (SSI Solaris 150) Tube Furnace (Tystar 8300) Tube Furnace Wafer Bonding (Thermco) Tube Furnace AlGaAs Oxidation (Lindberg) Wafer Bonder (SUSS SB6-8E) Wafer Bonder/Wax Mounting (Logitech WBS2)

Ovens - Overview of all Lab Ovens Ovens 1, 2 & 3 (Labline) Oven 4 (Thermo-Fisher HeraTherm) Oven 5 (Labline) High Temp Oven (Blue M)

Packaging

Back-end Fabrication Tools

Die Singulation / Down-sizing Dicing Saw (ADT) Manual Wafer Cleaver (PELCO Flipscribe) Automated Wafer Cleaver (Loomis LSD-155LT) Other Packaging Vacuum Sealer

Wafer/Die Bonding Flip-Chip Bonder (Finetech) Wafer Bonder (SUSS SB6-8E) Wafer Bonder/Wax Mounting (Logitech WBS2)

Measurement & Characterization

Metrology, Electrical/Optical Testing and Thin-Film/Materials Characterization tools

Inspection Microscopes 🔬 Optical Microscopes - General Use Fluorescence Microscope (Olympus MX51) Deep UV Optical Microscope (Olympus) Laser Scanning Confocal M-scope (Olympus LEXT) Digital Microscope #7 (Olympus DSX1000) Near-IR Inspection Scope (MJB-IR) Electron Microscopes 🦠 SEM 1 (JEOL IT800SHL) SEM 2 (JEOL IT800SHL) w/ EDAX SEM Sample Coater (Hummer) Topology / Profilometer 🏔️ Step Profilometer (KLA Tencor P-7) Step Profilometer (DektakXT) Atomic Force Microsope (Bruker ICON) Laser Scanning Confocal M-scope (Olympus LEXT)

Thin-Film/Material Analysis Optical 🔦 Ellipsometer (Woollam) Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV) Optical Film Thickness & Wafer-Mapping (Filmetrics F50) Reflection/Transmission Spectra & Optical Film Thickness (Filmetrics F10-RT-UVX) Electrical ⚡️ Probe Station & Source/Meter Units Resistivity Mapper (CDE RESMAP) Thermal HotSpot IR Microscope (QFI) Other 🔍 Film Stress (Tencor Flexus) Particle Counts (KLA/Tencor Surfscan) Photoluminescence PL Setup (Custom)

Decomissioned Tools

Click the link above for a list of tools that are no longer available in the lab, but the data is retained for legacy purposes.