Resistivity Mapper (CDE RESMAP)

Resistivity Mapper (CDE RESMAP) Location Bay ? Tool Type Inspection, Test and Characterization Manufacturer Creative Design Engineering Description CDE Resmap 4 Point Resistivity Mapper Primary Supervisor Bill Millerski (805) 893-2655 wmillerski@ucsb.edu Secondary Supervisor Tony Bosch Recipes

About

The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.

The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.

Instructions

• CDE ResMap Quick-Start instructions
• CDE ResMap Operating Instructions
• System can export CSV files - contact supervisor for instructions.