Surface Analysis (KLA/Tencor Surfscan): Difference between revisions
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|super= Biljana Stamenic |
|super= Biljana Stamenic |
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|location=Bay 5 |
|location=Bay 5 |
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|description = |
|description = Surface Analysis |
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(KLA/Tencor Surfscan) |
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|manufacturer = Tencor |
|manufacturer = Tencor |
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|materials = |
|materials = |
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Revision as of 17:11, 12 April 2016
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About
This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.