User contributions for Biljana
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13 November 2025
- 22:2022:20, 13 November 2025 diff hist +46 PECVD Recipes →Standard Clean Recipe (PECVD#2): "STD CF4/O2 Clean" Tag: Visual edit
10 November 2025
- 23:3723:37, 10 November 2025 diff hist −85 m PECVD Recipes Cleaning time after A-Si deposition (1min clean for 1min dep) Tag: Visual edit
7 November 2025
- 22:3922:39, 7 November 2025 diff hist +322 PECVD Recipes →Standard Cleaning Procedure (PECVD #2): added info regarding cleaning time for a-Si. Subject to change, since I used cleaning time user suggested ( 1.5 min clean for 1 min deposition time). Added info about max. dep. time for a-Si (1 hr- from Tony's e-mail). Tag: Visual edit
6 October 2025
- 20:3820:38, 6 October 2025 diff hist −7 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 20:3520:35, 6 October 2025 diff hist 0 N File:STD CF4-O2 Clean PECVD2.jpg No edit summary current
19 June 2025
- 21:3521:35, 19 June 2025 diff hist −18 Thermal Evap 2 (Solder) →Recipes current Tag: Visual edit
- 21:3421:34, 19 June 2025 diff hist +123 Thermal Evap 2 (Solder) →Recipes
- 21:3021:30, 19 June 2025 diff hist 0 File:Sn deposition in Thermal Evaporator2.pdf Biljana uploaded a new version of File:Sn deposition in Thermal Evaporator2.pdf current
- 21:2921:29, 19 June 2025 diff hist 0 N File:Sn deposition in Thermal Evaporator2.pdf No edit summary
- 21:2721:27, 19 June 2025 diff hist 0 Thermal Evaporation Recipes →Materials Table current Tag: Visual edit
- 21:0621:06, 19 June 2025 diff hist +33 Thermal Evaporation Recipes →Materials Table Tag: Visual edit
- 21:0521:05, 19 June 2025 diff hist +39 Thermal Evaporation Recipes →Materials Table: Updating info for Sn deposition in Thermal evaporator Tag: Visual edit
19 May 2025
- 21:1021:10, 19 May 2025 diff hist +79 Contact Alignment Recipes →SU-8 Recipes: Update for SU8-2015 recipe current Tag: Visual edit
- 21:0921:09, 19 May 2025 diff hist 0 N File:SU8-2015 for WIKi page.pdf No edit summary current
- 21:0821:08, 19 May 2025 diff hist −98 Contact Alignment Recipes →SU-8 Recipes
- 21:0821:08, 19 May 2025 diff hist +100 Contact Alignment Recipes →SU-8 Recipes
- 19:1219:12, 19 May 2025 diff hist 0 Contact Alignment Recipes →SU-8 Recipes
- 19:1119:11, 19 May 2025 diff hist +28 Contact Alignment Recipes →SU-8 Recipes
- 19:1119:11, 19 May 2025 diff hist +1 Lithography Recipes →Process Ranking Table
- 19:1019:10, 19 May 2025 diff hist +38 Lithography Recipes →Process Ranking Table
- 19:0019:00, 19 May 2025 diff hist −81 Lithography Recipes →Photolithography Recipes
- 18:5918:59, 19 May 2025 diff hist +81 Lithography Recipes →Photolithography Recipes
- 18:5618:56, 19 May 2025 diff hist +1 Lithography Recipes →Photolithography Recipes
- 18:5018:50, 19 May 2025 diff hist +172 Contact Alignment Recipes No edit summary
23 April 2025
- 18:1818:18, 23 April 2025 diff hist 0 Thermal Processing Recipes →Available Recipes (Tystar 8300) current Tag: Visual edit
- 18:1718:17, 23 April 2025 diff hist +21 Thermal Processing Recipes →Tystar 8300: added index Tag: Visual edit
- 18:1618:16, 23 April 2025 diff hist +52 UV Ozone Reactor →About: adding data for UV ozone 20min on Si quarter that was previously BHF etched [no native oxide]. current Tag: Visual edit
- 18:1218:12, 23 April 2025 diff hist +89 Thermal Processing Recipes →Available Recipes (Tystar 8300): Adding TOX rate and BHF etch rate for Thermally grown Oxide in Tube #3 at 750C Tag: Visual edit
- 17:5917:59, 23 April 2025 diff hist +1 Thermal Processing Recipes →Available Recipes (Tystar 8300) Tag: Visual edit
13 March 2025
- 17:1217:12, 13 March 2025 diff hist −1 Thermal Evap 2 (Solder) →Plot
- 17:1217:12, 13 March 2025 diff hist +28 Thermal Evap 2 (Solder) →Plot
- 17:1217:12, 13 March 2025 diff hist +88 Thermal Evap 2 (Solder) →Recipes
- 17:1017:10, 13 March 2025 diff hist 0 N File:Thermal Evaporator2-Plot.png No edit summary current
- 17:0917:09, 13 March 2025 diff hist −166 Thermal Evap 2 (Solder) →Plot
- 17:0617:06, 13 March 2025 diff hist +6 Thermal Evap 2 (Solder) →Recipes
- 17:0517:05, 13 March 2025 diff hist +120 Thermal Evap 2 (Solder) →Documentation
- 17:0417:04, 13 March 2025 diff hist 0 N File:Thermal Evaprator2-Cold Fixture-Indium Deposition.pdf No edit summary current
- 17:0317:03, 13 March 2025 diff hist +126 Thermal Evap 2 (Solder) →Documentation
- 17:0217:02, 13 March 2025 diff hist 0 N File:Thermal Evaporator2-Normal Fixture- Indium Deposition.pdf No edit summary current
- 16:5916:59, 13 March 2025 diff hist 0 N File:Thermal Evapoartor 2 Indium deposition plot (1).pdf No edit summary current
- 16:5816:58, 13 March 2025 diff hist 0 N File:Wiki-Thermal Evaporator2-Normal Fixture- Indium Deposition.docx No edit summary current
- 16:5816:58, 13 March 2025 diff hist 0 N File:Wiki-Thermal Evaprator2-Cold Fixture-Indium Deposition.docx No edit summary current
- 16:5616:56, 13 March 2025 diff hist −3 Thermal Evap 2 (Solder) →Recipes
- 16:5516:55, 13 March 2025 diff hist +163 Thermal Evap 2 (Solder) →Recipes
21 February 2025
- 19:2919:29, 21 February 2025 diff hist −2 PECVD 2 (Advanced Vacuum) →Documentation
- 19:2719:27, 21 February 2025 diff hist +3 PECVD 2 (Advanced Vacuum) →Documentation
- 19:2619:26, 21 February 2025 diff hist 0 File:PECVD2 Recipe Temperature Change.pdf Biljana uploaded a new version of File:PECVD2 Recipe Temperature Change.pdf current
- 19:2519:25, 21 February 2025 diff hist 0 File:PECVD2 STD LS Si3N4v4recipe depositiontime.pdf Biljana uploaded a new version of File:PECVD2 STD LS Si3N4v4recipe depositiontime.pdf current