Dry Etching Recipes: Difference between revisions

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| {{rl|ICP Etching Recipes|Ti Etch(Panasonic 1)}}
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! bgcolor="#D0E7FF" align="center" | Ru
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! bgcolor="#D0E7FF" align="center" | Ta
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! bgcolor="#D0E7FF" align="center" | Ta
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| {{rl|ICP Etching Recipes|Ti Etch(Panasonic 1)}}
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! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub>
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! bgcolor="#D0E7FF" align="center" | W-TiW
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| {{rl|ICP Etching Recipes|W-TiW Etch(Panasonic 1)}}
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! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub>
! bgcolor="#D0E7FF" align="center" | AlGaAs
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|{{rl|RIE Etching Recipes|AlGaAs Etch (RIE 5)}}
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|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}
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|{{rl|ICP Etching Recipes|ICP-Etch (Unaxis VLR)|GaAs-AlGaAs Etch (Unaxis VLR)|AlGaAs Etch (Unaxis VLR)}}
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! bgcolor="#D0E7FF" align="center" | HfO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | AlGaN
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| {{rl|ICP Etching Recipes|GaN Etch (Unaxis VLR)}}
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! bgcolor="#D0E7FF" align="center" | ITO
! bgcolor="#D0E7FF" align="center" | AlN
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| {{rl|RIE Etching Recipes|ITO Etch (RIE 2)}}
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| {{rl|ICP Etching Recipes|GaN Etch (Unaxis VLR)}}
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! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | GaAs
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| {{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}}
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| {{rl|RIE Etching Recipes|AlGaAs Etch (RIE 5)}}
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|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}
|{{rl|ICP Etching Recipes|GaAs Etch (Panasonic 2)}}
|{{rl|ICP Etching Recipes|ICP-Etch (Unaxis VLR)|GaAs-AlGaAs Etch (Unaxis VLR)|GaAs Etch (Unaxis VLR)}}
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| {{rl|ICP Etching Recipes|SIO2Etch(Panasonic 1)}}
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| {{rl|Other Dry Etching Recipes|Other Dry Etch (Vapor HF Etcher)}}
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! bgcolor="#D0E7FF" align="center" | SiN
! bgcolor="#D0E7FF" align="center" | GaN
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
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|{{rl|RIE Etching Recipes|RIE 5 (PlasmaTherm)|GaN Etch (RIE 5)}}
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| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 1)}}
| {{rl|ICP Etching Recipes|GaN Etch (Panasonic 1)}}
| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 2)}}
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! bgcolor="#D0E7FF" align="center" | HfO<sub>2</sub>
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! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub>
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! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | InGaAlAs
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| {{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
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| {{rl|ICP Etching Recipes|ICP-Etch (Unaxis VLR)|InP-InGaAs-InAlAs Etch (Unaxis VLR)|InP Etch (Unaxis VLR)}}
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! bgcolor="#D0E7FF" align="center" | TiN
! bgcolor="#D0E7FF" align="center" | InGaAsP
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! bgcolor="#D0E7FF" align="center" | ZnO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | InP
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! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | ITO
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| {{rl|RIE Etching Recipes|ITO Etch (RIE 2)}}
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| {{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}}
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| {{rl|RIE Etching Recipes|AlGaAs Etch (RIE 5)}}
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|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}
|{{rl|ICP Etching Recipes|GaAs Etch (Panasonic 2)}}
|{{rl|ICP Etching Recipes|ICP-Etch (Unaxis VLR)|GaAs-AlGaAs Etch (Unaxis VLR)|GaAs Etch (Unaxis VLR)}}
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
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|{{rl|RIE Etching Recipes|AlGaAs Etch (RIE 5)}}
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|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}
| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 1)}}
| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 2)}}
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|{{rl|ICP Etching Recipes|ICP-Etch (Unaxis VLR)|GaAs-AlGaAs Etch (Unaxis VLR)|AlGaAs Etch (Unaxis VLR)}}
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! bgcolor="#D0E7FF" align="center" | SiOxNy
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|{{rl|RIE Etching Recipes|RIE 5 (PlasmaTherm)|GaN Etch (RIE 5)}}
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Revision as of 20:59, 22 September 2017

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.
Dry Etching Recipes
RIE Etching ICP Etching Oxygen Plasma Systems Other Dry Etchers
Material RIE 1
(Retired) 		RIE 2
(MRC) 		RIE 3
(MRC) 		RIE 5
(PlasmaTherm) 		Si Deep RIE
(PTI/Bosch) 		ICP Etch 1
(Panasonic 1) 		ICP Etch 2
(Panasonic 2) 		ICP-Etch
(Unaxis VLR) 		Ashers
(Technics PEII) 		Plasma Clean
(Gasonics 2000) 		UV Ozone Reactor Plasma Activation
(EVG 810) 		XeF2 Etch
(Xetch) 		Vapor HF Etch
(uETCH) 		CAIBE
(Oxford)
Ag
Al A R1 R1
Au R1
Cr A R1 A
Cu
Ge
Mo
Ni R1
Pt R1
Ru
Ta
Ti R1 A
Al2O3
AlGaAs R1 R1 GaAs-AlGaAs Etch (Unaxis VLR)
AlGaN R1
AlN R1
GaAs R1 R1 R1 GaAs-AlGaAs Etch (Unaxis VLR)
GaN GaN Etch (RIE 5) R1 R1
HfO2
InGaAlAs InP-InGaAsP-InGaAlAs Etching (RIE 2) InP-InGaAs-InAlAs Etch (Unaxis VLR)
InGaAsP InP-InGaAsP-InGaAlAs Etching (RIE 2) InP-InGaAs-InAlAs Etch (Unaxis VLR)
InP InP-InGaAsP-InGaAlAs Etching (RIE 2) InP-InGaAs-InAlAs Etch (Unaxis VLR)
ITO R1
SiO2 SiO2 Etching (RIE 3) R1 R1 R1
SiN SiNx Etching (RIE 3) R1 R1
SiOxNy
Ta2O5
TiO2
TiN
W-TiW R1 A
ZnO2
ZrO2
GaSb GaSb Etch Unaxis VLR)
CdZnTe R1
Si R1 R1
SiC R1 A
Sapphire R1 A
ZnS R1
ZnSe R1
Material RIE 1
(Retired) 		RIE 2
(MRC) 		RIE 3
(MRC) 		RIE 5
(PlasmaTherm) 		Si Deep RIE
(PlasmaTherm/Bosch Etch) 		ICP Etch 1
(Panasonic E626I) 		ICP Etch 2
(Panasonic E640) 		ICP-Etch
(Unaxis VLR) 		Ashers
(Technics PEII) 		Plasma Clean
(Gasonics 2000) 		UV Ozone Reactor Plasma Activation
(EVG 810) 		XeF2 Etch
(Xetch) 		Vapor HF Etch
(uETCH) 		CAIBE
(Oxford)
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Dry_Etching_Recipes&oldid=154445"