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New Plasma-Therm Versaline DSE III DRIE etcher is qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. [[User:John d|-- Demis]] ([[User talk:John d|talk]]) 22:16, 27 November 2017 (PST) |
New Plasma-Therm Versaline DSE III DRIE etcher is qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. [[User:John d|-- Demis]] ([[User talk:John d|talk]]) 22:16, 27 November 2017 (PST) |
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= 2016 Survey Results = |
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See the May 2016 User Survey Results: {{file|Survey052016.pdf|Survey Results}} [[User:Thibeault|-- Brian Thibeault]] 12:00, 01 May 2016 |
See the May 2016 User Survey Results: {{file|Survey052016.pdf|Survey Results}} [[User:Thibeault|-- Brian Thibeault]] 12:00, 01 May 2016 |
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= CAIBE Ion Mill Available = |
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The [[CAIBE (Oxford Ion Mill)]] is up and running! Contact [[Brian Lingg]] for more information. [[User:Thibeault|-- Brian Thibeault]] 12:00, 01 July 2015 |
The [[CAIBE (Oxford Ion Mill)]] is up and running! Contact [[Brian Lingg]] for more information. [[User:Thibeault|-- Brian Thibeault]] 12:00, 01 July 2015 |
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= NanoFiles SFTP Online = |
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Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check [http://signupmonkey.ece.ucsb.edu SignupMonkey] for details. [[User:Thibeault|-- Brian Thibeault]] 12:00, 07 July 2013 |
Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check [http://signupmonkey.ece.ucsb.edu SignupMonkey] for details. [[User:Thibeault|-- Brian Thibeault]] 12:00, 07 July 2013 |
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Revision as of 06:48, 28 November 2017
News from the U.C. Santa Barbara Nanofabrication Facility
How to add new news items
- New news item should be inserted at the TOP of the list
- Item titles should have a level 2 heading (`==`)
- Each item should finish with user signature (four tildes `-- Demis (talk) 22:37, 27 November 2017 (PST)`). When you **Save** the page, this will be replaced with a timestamp and your user name. The timestamp determines the order of items in the feed - items without a timestamp show up at the end.
New Deep Silicon Etcher Online
New Plasma-Therm Versaline DSE III DRIE etcher is qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. -- Demis (talk) 22:16, 27 November 2017 (PST)
2016 Survey Results
See the May 2016 User Survey Results: Survey Results -- Brian Thibeault 12:00, 01 May 2016
CAIBE Ion Mill Available
The CAIBE (Oxford Ion Mill) is up and running! Contact Brian Lingg for more information. -- Brian Thibeault 12:00, 01 July 2015
NanoFiles SFTP Online
Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check SignupMonkey for details. -- Brian Thibeault 12:00, 07 July 2013