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ASML: intermittent alignment failures I have determined that the laser used for Alignment is failing, the power is low and it flickers. We will order a replacement ASAP and schedule an ASML engineering visit to install + calibrate a new one. In the mean time, I'm sorry to say that you will see intermittent "reject" wafers. Please see email for info on recovering from this error. // Demis D. John 18:14, 6 September 2024 (PDT) LAB OPEN House vacuum repair has been completed, lab is open for use. //Demis D. John 12:13, 6 September 2024 (PDT) MLA150: Down Heidelberg engineer is on site working on repair, we will update as we learn more. // Demis D. John 12:13, 6 September 2024 (PDT) IBD is UP The IBD is back up. With Mike Silva's help, the fixture was recovered without having to vent the loadlock/chamber. // Demis D. John 20:48, 6 September 2024 (PDT) Suss SB6-8E When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. -Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT) EBeam#2: Down Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good. However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter. -Lee // Demis D. John 14:24, 27 August 2024 (PDT) YES EcoClean: 3kW only I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. System is up for 3kW recipes only. DO NOT run 0.7kW recipes until further notice!! -- Lee Sawyer//Demis D. John 11:31, 23 August 2024 (PDT) ICP1 Down The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST) Lab Access Changes: Symmetry App The iris scanner has been decommissioned. Please use the card reader which supports: -Physical card -Mobile phone via Symmetry App //Vraj Mehalana 16:59, 14 June 2024 (PDT) How to use this wiki NanoFab Users are responsible for understanding their chemistry, risks and usage of various chemicals. Please read the MSDS sheets for the chemicals you use! Users can add qualified processing data to the Wiki pages; see the Editing_Tutorials for how to do that. Supervisors of individuals using the facility, e.g., UCSB Principal Investigators and external user managers are ultimately responsible for ensuring that their supervisees have the appropriate knowledge and training to work safely in the facility. They are also responsible for ensuring that all applicable regulatory requirements are met. This includes having a compliant "Chemical Hygiene Plan" per OSHA regulations. The information on this site should be considered as providing "general supporting information" to the Chemical Hygiene Plan of a particular supervisor. Supervisors can reference all or some of this site information within their Plans. UCSB EH&S can provide assistance to supervisors in preparing their Plans. News & Announcements News from the U.C. Santa Barbara Nanofabrication Facility. NSF-ATE Award for SBCC and UCSB: AS Degree in Semiconductors UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build an associates degree in semiconductors at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education" is one of 6 projects funded by an Intel-NSF partnership. The project builds on the existing "Cleanroom Bootcamps" already being run twice a year in the CNSI QSF cleanroom. -- Demis D. John 13:15, 14 August 2024 (PDT) CHIPS Act Award Announced to USC and UCSB NanoFab U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. -- Demis 12:06, 4 October 2023 (PDT) RIE#3 Removed We have removed RIE#3 from the Nanofab, it has gone to the Teaching Cleanroom. All user's processes have been transferred to the Fluorine ICP Etcher. // Demis D. John 15:58, 6 August 2024 (PDT) NanoFab staff awarded Goleta's Innovator of the Year 2023 NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. // Demis D. John 13:58, 7 November 2023 (PST) NanoFab Featured in Regional Tech Videos The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry. See the videos here: Santa Barbara County: This is TechTopia UCSB NanoFab: An Innovation Center // John d 09:26, 1 November 2023 (PST) See older articles at this link Important Links: Staff List Tool List Chemical List & MSDS Sheets Lab Rules FAQs External Links: SignUpMonkey NanoTech Homepage UCSB EE Dept. Get into the Lab Fabrication Services Seminars: Tech Talks Seminar Series

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