ASML 5500: Recovering from an Error

1. Do NOT exit task streaming!
   1. If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
2. Abort the Batch: Choose the task from the Task List, click Batch > "Abort"
3. In the following popup window, click "Remove Wafer from Litho Cluster"
4. Wait for the task status to change from "Aborting" to "Aborted"

Your wafer should be removed to Port #2, and the task should state "Aborted" on the task list.