Surface Analysis (KLA/Tencor Surfscan): Difference between revisions

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**''For detailed measurement info, it is highly recommended that you read the manual.''
**''For detailed measurement info, it is highly recommended that you read the manual.''
*[//wiki.nanotech.ucsb.edu/w/images/2/27/Surfscan-Surfscan_6200_info.pdf Surfscan Info]
*[//wiki.nanotech.ucsb.edu/w/images/2/27/Surfscan-Surfscan_6200_info.pdf Surfscan Info]
*Wafer scanning process traveler
*
*
=== Screenshots ===
=== Screenshots ===

Revision as of 22:19, 31 March 2020

Surface Analysis (KLA/Tencor Surfscan)
KLA.jpg
Tool Type Inspection, Test and Characterization
Location Bay 5
Supervisor Biljana Stamenic
Supervisor Phone (805) 893-4002
Supervisor E-Mail biljana@ece.ucsb.edu
Description Surface Analysis 
KLA/Tencor Surfscan
Manufacturer Tencor


About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 8 inches.

Documentation

Screenshots

UCSBTEST2 for big size particles (1.6-28.0)um
UCSBTEST2 for small size particles (0.16-1.6)um
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