Template:Announcements: Difference between revisions
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<!------------- Equipment Status ----------------> |
<!------------- Equipment Status ----------------> |
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===== Panasonic ICP2: Down ===== |
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Turbo pump failed, please see email for updates. |
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// [[User:John d|John d]] 00:54, 23 September 2020 (PDT) |
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===== Ion Beam Deposition: Down ===== |
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Load Lock turbo failed, please see email for updates. |
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// [[User:John d|John d]] 00:54, 23 September 2020 (PDT) |
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===== NanoFab COVID Response ===== |
===== NanoFab COVID Response ===== |
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Revision as of 07:54, 23 September 2020
Equipment Status
Panasonic ICP2: Down
Turbo pump failed, please see email for updates. // John d 00:54, 23 September 2020 (PDT)
Ion Beam Deposition: Down
Load Lock turbo failed, please see email for updates. // John d 00:54, 23 September 2020 (PDT)
NanoFab COVID Response
Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.
Contact the Lab Director for more information.
The most recent COVID Protocols can be found at COVID-19_User_Policies.
// John d 15:00, 19 July 2020 (PDT)
New Tool Installations
See the News Feed for info on two upcoming tool installations! We have a Raith Velion FIB and a Heidelberg MLA150 Maskless Aligner on the way.
// John d 17:48, 2 June 2020 (PDT)
Unaxis ICP-PECVD
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.
// Thibeault 14:22, 26 March 2020 (PDT)