Troubleshooting and Recovery: Difference between revisions

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__TOC__
WIP
These are old instructions that need some corrections.


What to do in case of computer (monitor) freeze-up. Please try these things in this
=== '''What to do in case of computer (monitor) freeze-up.''' ===
order.


Reboot – When terminal keyboard ( main keyboard- add photo) locks up, etc.
1) Try CTRL C followed by A and Enter. This will abort any command that may
have hung up


1. If the terminal keyboard (main keyboard) is not responding, first make sure the '''NO SCRL''' key was not pressed on the keyboard (add photo). This gives the appearance that the keyboard is locked up but the screen has just been paused.
.2) Press RESET on small monitor keyboard.

3) Follow this sequence:
2. On the terminal keyboard (main keyboard) press type '''Ctrl''' + ''']'''     (Press '''Ctrl''' first then ''']'''  )                     
a) Pull out upper keyboard.

b) Hit “Scroll Lock” button twice followed by the number 2. This switches the
upper monitor from the smart-set computer to the PC control computer. Try a
This exits the terminal and returns control to the MOP PC(#1).- add photo

second time if this doesn’t work. You should see a black screen with “Ready”
3. Pullout the PC keyboard (upper keyboard, add photo) and press button '''Scroll Lock''' twice. This toggles the KVM switch from the Smart Set PC (#2) to the MOP PC (#1).
near the top or you will see a menu driven screen. If the monitor switching

does not work, go up to the gray interfce box on top of the stepper control
4. Using the mouse (next to upper keyboard) , select ALT + X to exit (bottom off the screen). You can also type ALT + X on the keyboard. A window will open (on the top monitor, add photo) asking to power down the Stepper, click OK. The PC will exit to DOS.
rack. Press the gray flash button. This is located in the area where the cables

all plug in.
5. At this point you can either restart the software from DOS or turn the MOP PC (#1) off and on (add photo). To restart from DOS, enter '''stepper''' at the DOS prompt.
c) Push in upper keyboard.

d) Lift up plastic flap over lower keyboard and press break
6. The main menu for the MOP PC (#1) should appear on the top monitor once the software/PC boots up. Pullout the PC keyboard (upper keyboard) and using the mouse, select '''Operate Stepper''' -> '''Start'''. Put the keyboard away.
e) Turn off lower monitor by pulling out the monitor box and using the switch on

the top right front corner of the box (DO NOT TURN OFF SYSTEM
7. At the prompt on the lower monitor, using the main keyboard, enter '''the time and date as specified''' (10:25 19-NOV-02). Press Enter ( the return key)
POWER SWITCH ON MONITOR! This will shut down the whole system)

f) Wait 1 minute and turn the monitor back on.
8. LOG IN [10,1], type ORIG . The stage will find its origin and then go back to the load position
g) Let monitor warm up until you see a cursor on the screen.

h) Hit the Set Up key on the stepper keyboard (lower keyboard)
9. LOG OUT.
i) Hit Line/Local key (number 4) so that the on-line LED lights.

j) Hit the Set Up key again. You should have a cursor on the screen.
=== '''What to do if the local alignment or wafer exposure mapping hangs up on the upper monitor.''' ===
k) Pull out upper keyboard and press the Alt button and “O” at the same time.
1) Reset lower Advent computer (#2)- add photo and wait for reboot.
l) Hit Return to start the program.

m) Push in upper keyboard.
=== '''What to do in case of unplanned power outage'''. ===
n) At the prompt on the lower monitor, enter the time and date as specified
(10:25 19-NOV-02)
o) Stepper will finish booting up.
p) Pull out upper keyboard and hit “Scroll Lock” button twice followed by the
number 1 to transfer monitor back to the smart-set computer. Try a couple
times if this does not work and use the flash button (see instruction b) if
needed.
q) You are ready to Log In.
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4) Follow this sequence:
a) Follow system shut down sequence, but DO NOT TURN OFF LAMP OR
ENVIRONMENTAL UNIT
b) Wait 5 minutes.
c) Follow system start-up sequence except for instructions on lamp or
environmental unit.
What to do if the local alignment or wafer exposure mapping hangs up on the upper
monitor.
1) Reset lower Advent computer and wait for reboot.
What to do in case of unplanned power outage.
1) CR Staff will take care of the system in the morning.
1) CR Staff will take care of the system in the morning.

What to do for alignment error.
=== Errors job related ===
1) Verify that correct alignment key offset is being used
'''What to do for alignment error.'''
2) Verify that the mask is aligned

3) Verify that the baseline is correct (check values in MODE against the last
1) Verify that '''correct alignment key offset''' is being used
calibration in the calibration notebook)

2) Verify that '''the mask''' is aligned

3) Verify that the baseline is correct (check values in MODE against the last calibration in the calibration notebook)

4) If you have DFAS alignment marks, perform a MAP job to verify alignment.
4) If you have DFAS alignment marks, perform a MAP job to verify alignment.

What to do for focus resolution problems.
'''What to do for focus resolution problems'''.
1) Verify system focus using the MODE command

2) Perform a focus (EXPO) job using the same type of wafer that you will use
1) Verify '''system focus''' using the MODE command
for your real job and use the optimal focus offset determined from this job.

You may need to look at both exposure time and focus.
2) Perform a focus optimization job (using command '''EXPO''' '''job name'''). Use F- to vary focus, enter exposure time. You need to enter the increment step. Use one of your jobs that is already written. Use the same type of wafer that you will be using for your real job (substrate type, and thickness). If you need to optimize both (exposure time and focus), you will use the same command '''EXPO''' '''''job nam''e''', and will enter starting exposure time, and focus, and increment step for both.

3) Verify that your wafer is not bowed (i.e. under stress from some process)
3) Verify that your wafer is not bowed (i.e. under stress from some process)

What to do in case of mask vacuum problem.
'''What to do in case of mask vacuum problem'''.
1) Check that small pump is running in back of system.

Make sure vacuum level is above 20” Hg.
1) Check that small pump is running in back of system. Make sure vacuum level is above 20” Hg.

2) Push foot down onto mask with hand so that the vacuum holds the mask.
2) Push foot down onto mask with hand so that the vacuum holds the mask.

What to do in case of focus getting stuck and system hanging up.
'''What to do in case of focus getting stuck and system hanging up'''.
1) Adjust manual focus knob so that a negative number appears on volt meter.

2) Note die on computer screen at right of system. Abort using Ctrl-C followed
1) Adjust manual focus knob so that a negative number appears on voltmeter ( add photo).
by A, edit the program and drop out the problem die. If you have exposed

some die already, you may want to drop them out too for the second run.
2) Note die on computer screen that was exposed. Abort using Ctrl-C followed by A. Edit the program and drop out the problem die. If you have exposed some die already, you may want to drop them out too for the second run.
What to do in case of the stage limit going too far (red stage limit light will be lit

inside the stepper chamber next to the joystick.
'''What to do in case of the stage limit going too far''' (red stage limit light will be lit inside the stepper chamber next to the joystick.
14

1) Press the lit limit switch to release the stage.
1) Press the lit limit switch to release the stage.

Contacts to call if you cannot undo the problem. Do not call after 10 p.m. unless there
'''Reporting the error/issue'''
is a real emergency (A deadline for a paper or conference is not a real emergency)

1) Mike Silva (or Lee Saweyr)
Who to call if you cannot undo the problem or need some help with Stepper
2) 3C (These guys know all about the stepper, they service it. Ask for Matt , Mike or Adam. 480-892-4433).

3) If neither can be reached, leave a note that stepper is down. E-mail nanofab@ece.ucsb.edu to report a problem.
1) Biljana Stamenic ( if it is related to the job or stepper use)

2) Lee Sawyer (if there is the issue with the tool, something not working/broken)

2) Mike Silva (if neither Lee or Biljana can be reached)

3) NOTE: Leave a note that stepper is down. E-mail nanofab@ece.ucsb.edu to report a problem.

Latest revision as of 16:47, 7 May 2021

What to do in case of computer (monitor) freeze-up.

Reboot – When terminal keyboard ( main keyboard- add photo) locks up, etc.

1. If the terminal keyboard (main keyboard) is not responding, first make sure the NO SCRL key was not pressed on the keyboard (add photo). This gives the appearance that the keyboard is locked up but the screen has just been paused.

2. On the terminal keyboard (main keyboard) press type Ctrl + ]     (Press Ctrl first then ]  )                     

This exits the terminal and returns control to the MOP PC(#1).- add photo

3. Pullout the PC keyboard (upper keyboard, add photo) and press button Scroll Lock twice. This toggles the KVM switch from the Smart Set PC (#2) to the MOP PC (#1).

4. Using the mouse (next to upper keyboard) , select ALT + X to exit (bottom off the screen). You can also type ALT + X on the keyboard. A window will open (on the top monitor, add photo) asking to power down the Stepper, click OK. The PC will exit to DOS.

5. At this point you can either restart the software from DOS or turn the MOP PC (#1) off and on (add photo). To restart from DOS, enter stepper at the DOS prompt.

6. The main menu for the MOP PC (#1) should appear on the top monitor once the software/PC boots up. Pullout the PC keyboard (upper keyboard) and using the mouse, select Operate Stepper -> Start. Put the keyboard away.

7. At the prompt on the lower monitor, using the main keyboard, enter the time and date as specified (10:25 19-NOV-02). Press Enter ( the return key)

8. LOG IN [10,1], type ORIG . The stage will find its origin and then go back to the load position

9. LOG OUT.

What to do if the local alignment or wafer exposure mapping hangs up on the upper monitor.

1) Reset lower Advent computer (#2)- add photo and wait for reboot.

What to do in case of unplanned power outage.

1) CR Staff will take care of the system in the morning.

Errors job related

What to do for alignment error.

1) Verify that correct alignment key offset is being used

2) Verify that the mask is aligned

3) Verify that the baseline is correct (check values in MODE against the last calibration in the calibration notebook)

4) If you have DFAS alignment marks, perform a MAP job to verify alignment.

What to do for focus resolution problems.

1) Verify system focus using the MODE command

2) Perform a focus optimization job (using command EXPO job name). Use F- to vary focus, enter exposure time. You need to enter the increment step. Use one of your jobs that is already written. Use the same type of wafer that you will be using for your real job (substrate type, and thickness). If you need to optimize both (exposure time and focus), you will use the same command EXPO job name, and will enter starting exposure time, and focus, and increment step for both.

3) Verify that your wafer is not bowed (i.e. under stress from some process)

What to do in case of mask vacuum problem.

1) Check that small pump is running in back of system. Make sure vacuum level is above 20” Hg.

2) Push foot down onto mask with hand so that the vacuum holds the mask.

What to do in case of focus getting stuck and system hanging up.

1) Adjust manual focus knob so that a negative number appears on voltmeter ( add photo).

2) Note die on computer screen that was exposed. Abort using Ctrl-C followed by A. Edit the program and drop out the problem die. If you have exposed some die already, you may want to drop them out too for the second run.

What to do in case of the stage limit going too far (red stage limit light will be lit inside the stepper chamber next to the joystick.

1) Press the lit limit switch to release the stage.

Reporting the error/issue

Who to call if you cannot undo the problem or need some help with Stepper

1) Biljana Stamenic ( if it is related to the job or stepper use)

2) Lee Sawyer (if there is the issue with the tool, something not working/broken)

2) Mike Silva (if neither Lee or Biljana can be reached)

3) NOTE: Leave a note that stepper is down. E-mail nanofab@ece.ucsb.edu to report a problem.

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