Resistivity Mapper (CDE RESMAP): Difference between revisions

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{{tool|{{PAGENAME}}
{{tool2|{{PAGENAME}}
|picture=CDEResmap.jpg
|picture=CDEResmap.jpg
|type = Inspection, Test and Characterization
|type = Inspection, Test and Characterization
|super= Bill Millerski
|super= Bill Millerski
|super2= Tony Bosch
|phone=(805)839-3918x217
|phone=(805)839-3918x217
|location=Bay ?
|location=Bay ?
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|materials =
|materials =
}}
}}
= About =
=About=
The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.
The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.


The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.
The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.


== Instructions ==
==Instructions==

* [[CDE ResMap Quick-Start instructions]]
*[[CDE ResMap Quick-Start instructions]]
*[https://wiki.nanofab.ucsb.edu/w/images/3/37/CDE_ResMap_Operating_Instructions.pdf CDE ResMap Operating Instructions]
*System can export CSV files - contact supervisor for instructions.

Latest revision as of 22:07, 30 October 2023

Resistivity Mapper (CDE RESMAP)
CDEResmap.jpg
Location Bay ?
Tool Type Inspection, Test and Characterization
Manufacturer Creative Design Engineering
Description CDE Resmap 4 Point Resistivity Mapper
Primary Supervisor Bill Millerski
(805) 893-2655
wmillerski@ucsb.edu

Secondary Supervisor

Tony Bosch

Recipes


About

The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.

The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.

Instructions

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