Template:Announcements: Difference between revisions
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=====Year End Shutdown===== |
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We will be shutting down lab operations Tuesday Dec 26th at 9 am for year end maintenance activities. The current plan is to be back open for operations Thursday Dec 28th at 2 pm. |
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Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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The staff will be on Holiday Dec 25th & 26th, and January 1st & 2nd. |
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Please plan your process accordingly. |
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Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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//[[User:Mehalana v|Vraj Mehalana]] |
//[[User:Mehalana v|Vraj Mehalana]] 14:39, 16 November 2023 (PST) |
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=====PECVD2 is up for SiO2 and Std SiN Only===== |
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We have adjusted recipes for SiO2 and Std SiN. These are available for use. Read the emails first. |
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Low Stress SiN and a-Si are not yet adjusted and are not ready for use. We hope to have these done the week of 11/20 |
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// [[User:Thibeault|Thibeault]] 09:10, 16 November 2023 (PST) |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
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=====Sputter #3 (AJA) - Sputter 3 Si target is consumed===== |
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Do not try to use the Si target, it is completely consumed. I am going to install a new target Friday morning. |
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Tony |
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=====Dicing Saw (ADT) Upgrade 10/9===== |
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The dicing saw is scheduled go down for an upgrade on Monday October 9th and will be down for that week and into the weekend. Part of the upgrade will be updated software and will require users to be re-trained. I will provide more info on the re-training once I get a little hands on time with the updated software. |
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ADT will be able to transfer your recipes from the GUI software to the NUI software. Please note that we do sometimes run into an issue with a recipe, as it is not a 100% perfect process, but the vast majority of the recipes do transfer over. If there are any you are concerned about, please make sure you have all parameters documented prior to us upgrading the machine. |
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Documentation of recipes is the user's responsibility, Staff will not be taking care of this. |
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-Lee |
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=====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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=====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: |
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(1) 09-30-23 8:00am-5:00pm |
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(2) 10-01-23 8:00am-5:00pm |
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(3) 10-02-23 8:00am-12:00pm |
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Please plan your work activities accordingly. |
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===== EVG is down===== |
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We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next week and will update everyone at that time. -Lee |
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Revision as of 23:13, 6 December 2023
Year End Shutdown
We will be shutting down lab operations Tuesday Dec 26th at 9 am for year end maintenance activities. The current plan is to be back open for operations Thursday Dec 28th at 2 pm. //Vraj Mehalana 15:13, 5 December 2023 (PST) The staff will be on Holiday Dec 25th & 26th, and January 1st & 2nd.
//Vraj Mehalana 14:39, 16 November 2023 (PST)
PECVD2 is up for SiO2 and Std SiN Only
We have adjusted recipes for SiO2 and Std SiN. These are available for use. Read the emails first. Low Stress SiN and a-Si are not yet adjusted and are not ready for use. We hope to have these done the week of 11/20
// Thibeault 09:10, 16 November 2023 (PST)
Job Opening: Process Engineer
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.
//Vraj Mehalana 14:52, 30 October 2023 (PDT)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App".
// John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.
//Vraj Mehalana 09:59, 20 September 2023 (PDT)
Sputter #3 (AJA) - Sputter 3 Si target is consumed
Do not try to use the Si target, it is completely consumed. I am going to install a new target Friday morning.
Tony //Vraj Mehalana 15:13, 6 December 2023 (PST)