Template:Announcements: Difference between revisions
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Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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//11:17, 24 May 2024 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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=====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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Sorry for the inconvenience. |
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//[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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Revision as of 17:22, 29 May 2024
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
//Vraj Mehalana 11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)