Template:Announcements: Difference between revisions
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We are continuing to work our way through the issue plaguing this system. Unfortunately running at lower power did not work. We will send updates more regularly to keep you all informed. |
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=====ASML: intermittent alignment failures===== |
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Tony |
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I have determined that the laser used for Alignment is failing, the power is low and it flickers. |
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We will order a replacement ASAP and schedule an ASML engineering visit to install + calibrate a new one. |
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=====MLA 150 Service Next Week - REMINDER===== |
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The MLA 150 will be down for a service visit from Tuesday February 6th to Thursday February 8th. The tool should be available in the evenings and it's possible the work will be completed by the end of Wednesday. |
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In the mean time, I'm sorry to say that you will see intermittent "reject" wafers. Please see email for info on recovering from this error. |
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Here's the schedule for when the tool will be unavailable: |
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Tues (2/6): 11:30 am - 5 pm |
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Wed (2/7): 8 am - 5 pm |
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House vacuum repair has been completed, lab is open for use. |
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=====MLA150: Down===== |
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Thurs (2/8) 8 am - 5 pm (if needed). |
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Heidelberg engineer is on site working on repair, we will update as we learn more. |
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// [[User:John_d|Demis D. John]] 12:13, 6 September 2024 (PDT) |
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-Lee |
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The IBD is back up. |
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With Mike Silva's help, the fixture was recovered without having to vent the loadlock/chamber. |
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// [[User:John_d|Demis D. John]] 20:48, 6 September 2024 (PDT) |
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===== |
=====Suss SB6-8E===== |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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The servicing is completed for both of the MJB-3s. The stage issue with the IR system has been resolved as well. |
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-Aidan |
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=====MA6 Service Next Week - REMINDER===== |
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The MA-6 will be unavailable Tuesday Feb 6th from 8 am to roughly 5 pm for its annual service visit. |
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The issue with the backside camera magnification getting stuck will be addressed during the visit. |
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Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good. |
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However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter. |
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-Lee |
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//[[User: |
-Lee // [[User:John_d|Demis D. John]] 14:24, 27 August 2024 (PDT) |
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RIE 5 is up except for processes that use SiCl4. |
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=====YES EcoClean: 3kW only===== |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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System is up for 3kW recipes only. |
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I'll send out an update in the next 2-3 days. |
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DO NOT run 0.7kW recipes until further notice!! |
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Thanks, |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 5 February 2024 (PST) |
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-- |
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Lee Sawyer//[[User:John_d|Demis D. John]] 11:31, 23 August 2024 (PDT) |
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The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning. |
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=====ICP1 Down===== |
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-Lee |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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=====EBeam3 Planned Maintenance 2/7/24 - 2/8/24===== |
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EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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-Physical card |
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Please plan accordingly. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST) |
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=====Oxford Cobra: Software bugs===== |
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The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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-Mobile phone via Symmetry App |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Revision as of 03:48, 7 September 2024
ASML: intermittent alignment failures
I have determined that the laser used for Alignment is failing, the power is low and it flickers.
We will order a replacement ASAP and schedule an ASML engineering visit to install + calibrate a new one.
In the mean time, I'm sorry to say that you will see intermittent "reject" wafers. Please see email for info on recovering from this error.
// Demis D. John 18:14, 6 September 2024 (PDT)
LAB OPEN
House vacuum repair has been completed, lab is open for use. //Demis D. John 12:13, 6 September 2024 (PDT)
MLA150: Down
Heidelberg engineer is on site working on repair, we will update as we learn more. // Demis D. John 12:13, 6 September 2024 (PDT)
IBD is UP
The IBD is back up.
With Mike Silva's help, the fixture was recovered without having to vent the loadlock/chamber. // Demis D. John 20:48, 6 September 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
EBeam#2: Down
Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good.
However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter.
-Lee // Demis D. John 14:24, 27 August 2024 (PDT)
YES EcoClean: 3kW only
I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further.
System is up for 3kW recipes only.
DO NOT run 0.7kW recipes until further notice!!
-- Lee Sawyer//Demis D. John 11:31, 23 August 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)