Template:Announcements: Difference between revisions
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//13:47, 26 February 2024 (PST) |
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=====ASML: intermittent alignment failures===== |
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I have determined that the laser used for Alignment is failing, the power is low and it flickers. |
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We were able to start running recipes last night but we found the C4F8 MFC wasn’t controlling. I’ve ordered a new MFC that’s due to be on site Tuesday morning. If all goes well the tool should be up that afternoon. |
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We will order a replacement ASAP and schedule an ASML engineering visit to install + calibrate a new one. |
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=====ICP #1 is down - Update===== |
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Some additional work is needed on the replacement board that we are waiting on. I have been informed that it will not be shipping until after the 20th (no solid date). |
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In the mean time, I'm sorry to say that you will see intermittent "reject" wafers. Please see email for info on recovering from this error. |
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RIE 5 is up except for processes that use SiCl4. |
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=====EBeam3 Transfer Arm Upgrade - Postponed===== |
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The Transfer Arm upgrade has been postponed again, this time due to motor driver compatibility issues. |
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I am waiting to hear back from the manufacturer so at this time I can not reschedule yet. |
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House vacuum repair has been completed, lab is open for use. |
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=====MLA150: Down===== |
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I will send another notification when everything has been worked out, and I am ready to schedule the installation. |
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Heidelberg engineer is on site working on repair, we will update as we learn more. |
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//[[User:John_d|Demis D. John]] |
// [[User:John_d|Demis D. John]] 12:13, 6 September 2024 (PDT) |
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=====IBD is UP===== |
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The IBD is back up. |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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With Mike Silva's help, the fixture was recovered without having to vent the loadlock/chamber. |
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// [[User:John_d|Demis D. John]] 20:48, 6 September 2024 (PDT) |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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-Aidan |
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//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT) |
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=====EBeam#2: Down===== |
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Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good. |
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However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter. |
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=====YES EcoClean: 3kW only===== |
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I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. |
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System is up for 3kW recipes only. |
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DO NOT run 0.7kW recipes until further notice!! |
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-- |
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Lee Sawyer//[[User:John_d|Demis D. John]] 11:31, 23 August 2024 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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-Physical card |
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-Mobile phone via Symmetry App |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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Revision as of 03:48, 7 September 2024
ASML: intermittent alignment failures
I have determined that the laser used for Alignment is failing, the power is low and it flickers.
We will order a replacement ASAP and schedule an ASML engineering visit to install + calibrate a new one.
In the mean time, I'm sorry to say that you will see intermittent "reject" wafers. Please see email for info on recovering from this error.
// Demis D. John 18:14, 6 September 2024 (PDT)
LAB OPEN
House vacuum repair has been completed, lab is open for use. //Demis D. John 12:13, 6 September 2024 (PDT)
MLA150: Down
Heidelberg engineer is on site working on repair, we will update as we learn more. // Demis D. John 12:13, 6 September 2024 (PDT)
IBD is UP
The IBD is back up.
With Mike Silva's help, the fixture was recovered without having to vent the loadlock/chamber. // Demis D. John 20:48, 6 September 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
EBeam#2: Down
Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good.
However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter.
-Lee // Demis D. John 14:24, 27 August 2024 (PDT)
YES EcoClean: 3kW only
I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further.
System is up for 3kW recipes only.
DO NOT run 0.7kW recipes until further notice!!
-- Lee Sawyer//Demis D. John 11:31, 23 August 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)