Dicing Saw (ADT): Difference between revisions
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|super= Lee Sawyer |
|super= Lee Sawyer |
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|super2= Aidan Hopkins |
|super2= Aidan Hopkins |
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|location= |
|location=Backend Lab: ESB 1111 |
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|description = ADT Dicing Saw |
|description = ADT Dicing Saw |
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|model = ADT 7100 |
|model = ADT 7100 |
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==About== |
==About== |
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The Model 7100 Series is a semi-automatic dicing saw. Semiconductor, glass, and plastic substrates of all types can be automatically or manually cut. This dicing Saw is optimized for multi-angle dicing of tight tolerance substrates up to 200 mm diameter in size. |
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==Detailed Specifications== |
==Detailed Specifications== |
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*Maximum Wafer Size: 8" |
*Maximum Wafer Size: 8" |
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*Parts mounted to UV-release tape for |
*Parts mounted to UV-release tape for dicing |
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*Automated cut maps at multiple angles (0° and 90° typical) |
*Automated cut maps at multiple angles (0° and 90° typical) |
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*~Few micron alignment to on-wafer features. |
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*Thermocarbon Resnoid dicing blades provided by |
*Thermocarbon Resnoid dicing blades provided by Staff |
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==Operating Procedures== |
==Operating Procedures== |
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*[https://wiki. |
*[https://wiki.nanofab.ucsb.edu/w/images/5/54/ADT_SOP_Rev_J.pdf ADT Dicing Saw Standard Operating Procedure] |
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*[https://wiki. |
*[https://wiki.nanofab.ucsb.edu/w/images/5/5c/Post_Dicing_Tape_Expansion_SOP.pdf Post Dicing Tape Expansion] |
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*[https://wiki.nanofab.ucsb.edu/w/images/5/5a/Ultron_1042R_Film_specs.pdf Ultron Systems, Inc. 1042R Anti-Static Ultraviolet Film TDS] |
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*[[ADT 7100 - Recovering an Old Recipe (2019)|Recovering an Old Recipe]] |
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*[https://wiki.nanofab.ucsb.edu/w/images/5/59/Recipe_Importing_New_Software.pdf Recovering an Old Recipe (2023)] |
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Latest revision as of 17:55, 24 September 2024
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About
The Model 7100 Series is a semi-automatic dicing saw. Semiconductor, glass, and plastic substrates of all types can be automatically or manually cut. This dicing Saw is optimized for multi-angle dicing of tight tolerance substrates up to 200 mm diameter in size.
Check the Dicing Saw Recipes page for the blades we currently stock.
An ADT WM-966 tape applicator is used to mount samples to UV-release tape for dicing and an Ultron Systems UH104-8 UV lamp system is used to release samples post dicing.
Contact Staff for blades and dicing frames for your group.
Detailed Specifications
- Maximum Wafer Size: 8"
- Parts mounted to UV-release tape for dicing
- Automated cut maps at multiple angles (0° and 90° typical)
- ~Few micron alignment to on-wafer features.
- Thermocarbon Resnoid dicing blades provided by Staff
Operating Procedures
- ADT Dicing Saw Standard Operating Procedure
- Post Dicing Tape Expansion
- Ultron Systems, Inc. 1042R Anti-Static Ultraviolet Film TDS
- Recovering an Old Recipe (2023)
Recipes
- Recipes > Packaging > Dicing Saw Recipes (ADT 7100)
Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting.