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| − | =====MLA150 Maintenance: Aug 15-17th===== |
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| − | The MLA will be receiving a bi-annual factory service beginning Tuesday (8/15) at 8 am. We are also having the hard drive upgraded to deal with the low disk space issues we have been having. To be on the safe side, the vendor is planning for this service trip to potentially last until Thursday (8/17) with the tool being available after 5 pm each day. This again is out of an abundance of caution and if all goes smoothly, we anticipate for the work to be completed some time Wednesday. Please plan you processing accordingly. -Lee |
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| + | =====Stepper #3 (ASML DUV) - Tool down===== |
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| + | Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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| + | Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT) |
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| − | The current schedule to replace SEM #2 is set to begin Monday the 31st of July. |
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| − | We will begin decommissioning the tool that morning. Please plan accordingly. |
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| − | The new SEM #2 installation completion is still TBD. We will update you all as progress is made. |
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+ | =====MLA Service Complete===== |
| + | The FSE has completed their work. |
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| − | We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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| − | Runs will still require Staff supervision until then. |
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| + | I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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| + | Tool is available to use. |
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| + | When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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| + | -Aidan |
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| + | =====ICP1 Down===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | -Physical card |
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| + | -Mobile phone via Symmetry App |
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Latest revision as of 18:36, 3 October 2024
Stepper #3 (ASML DUV) - Tool down
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.
Unfortunately, we cannot initialize the stage at this time. System is down. // Vraj Mehalana 18:36, 3 October 2024 (PDT)
MLA Service Complete
The FSE has completed their work.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.
Tool is available to use.
-Lee // Demis D. John 17:46, 2 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)