Difference between revisions of "Template:Announcements"
(lab card/iris access, Symmetry app and updates) |
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+ | =====Stepper #3 (ASML DUV) - Tool down===== |
| + | Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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| − | The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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| + | Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT) |
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| − | Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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| − | // [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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| − | ===== |
+ | =====MLA Service Complete===== |
| + | The FSE has completed their work. |
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| − | The probe station is up, only the computer is down. Standard electrical probe measurements are still available, just not automated plotting |
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| + | I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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| − | We were able to fix the vacuum leak but unfortunately the particulates are off the chart and rate is still a bit low. Tomorrow morning we will be taking the showerhead apart and cleaning it up before testing again. |
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| + | Tool is available to use. |
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| − | =====Wafer Bonder, (Suss SB6-8E)===== |
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| − | The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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| − | //[[User: |
+ | -Lee // [[User:John_d|Demis D. John]] 17:46, 2 October 2024 (PDT) |
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| + | When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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| + | -Aidan |
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| + | =====ICP1 Down===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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Latest revision as of 18:36, 3 October 2024
Stepper #3 (ASML DUV) - Tool down
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.
Unfortunately, we cannot initialize the stage at this time. System is down. // Vraj Mehalana 18:36, 3 October 2024 (PDT)
MLA Service Complete
The FSE has completed their work.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.
Tool is available to use.
-Lee // Demis D. John 17:46, 2 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)