Template:Announcements: Difference between revisions
Mehalana v (talk | contribs) No edit summary |
(deleted ASML update) |
||
| (72 intermediate revisions by 3 users not shown) | |||
| Line 1: | Line 1: | ||
<startfeed /> |
<startfeed /> |
||
=====Stepper #3 (ASML DUV) - System UP and calibrated===== |
|||
We have finished calibrations, |
|||
System is up. |
|||
| ⚫ | |||
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
|||
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
|||
-Aidan |
|||
//11:17, 24 May 2024 (PDT) |
|||
| ⚫ | |||
=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
|||
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
|||
| ⚫ | |||
=====MA6 TSA is down - Update===== |
|||
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
|||
The tool remains up for backside alignment and topside exposures that do not require alignment. |
|||
-Lee |
|||
//15:59, 22 May 2024 (PDT) |
|||
=====Velion FIB Tool DOWN===== |
|||
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
|||
=====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
|||
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
|||
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
|||
Sorry for the inconvenience. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
|||
=====ICP1 Down===== |
=====ICP1 Down===== |
||
| Line 46: | Line 18: | ||
-Mobile phone via Symmetry App |
-Mobile phone via Symmetry App |
||
// |
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
||
| ⚫ | |||
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
|||
<!-- |
<!-- |
||
Latest revision as of 00:45, 7 November 2024
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)