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Equipment Info Recipes + Processes Data + Info Other Links: SignUpMonkey Get into the Lab Fabrication Services NanoTech Homepage NanoFab Job Postings UCSB ECE Dept. Lithography Deposition Dry Etch Wet Process Thermal Process Packaging/Bonding Metrology/Test Lithography Deposition Dry Etching Wet Etching Thermal Process Packaging/Bonding Process Control Data Calculators + Utilities Nanofab Data + Info Research + Publications Tech Talks Lab is Open All suits have been pulled and new suits have been put up. All personal items left behind can be found in the boxes in the lobby. Please sign up for your hanger spot. THE LAB IS NOW OPEN FOR BUSINESS Thank you for your patience during shutdown activities. -- Peder Lenvik // Demis D. John 03:34, 3 January 2025 (UTC) New Gowns in Jan We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. Two vendors for cleanroom belts we are using, you may request others: Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist. HiTEC Fannypack // Demis D. John 03:34, 3 January 2025 (UTC) KLA P7 Profilometer: Down The KLA remains down awaiting parts. This part order has been expedited to the extent possible and should be here in the next few days. Thanks Bill Millerski // Demis D. John 03:30, 3 January 2025 (UTC) Oxford ALD+Ion Mill Unfortunately Chamber 1 is still down for our Oxford Cluster tool. However we did manage a "work around" to get Chamber 2 and Chamber 3 operational again. The software is in constant error state which does not affect processing on Chamber 2 and Chamber 3. A new tool listing is available in sign up monkey for both these chambers with the word "temporary" or "temp". For the time being users will have to use these "new" tool listings to reserve time on Chamber 2 and Chamber 3. Users will have to go through a quick tutorial with me prior to having access to the tool in order to reserve time slots on sign up monkey. Under NO circumstances are users to use this tool prior to being signed off after being shown how to navigate the software under the current error state. Just to reiterate: 1) The tool remains locked out in sign up monkey for the previous tool names 2) There is a new tool designation for Chamber 2 & 3 in sign up monkey"Deposition, ALD, Chamber 3 (Oxford FlexAl) Temporary""Dry Etch, Ion Mill (Oxford Flexal) Temp" 3) Users need a quick tutorial from me prior to getting tool access. 4) Users are not to run the tool until being signed off on the new procedure by staff! Any user caught using the tool without having the updated tool tutorial sign off, will be subject to suspension. 5) I will be available at any time during my regular scheduled shift to sign users off. I will be at the tool in the lab for the majority of my work day. -- Bill Millerski //Vraj Mehalana 23:40, 8 January 2025 (UTC) Holography/PL: HeCd Laser Down Mon Dec 16th The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again soon after Monday Jan 6th. We will be installing the refurbished laser which will have higher output power. Holography will be unavailable during this time, but all other PL lasers will be available. // Demis D. John 03:28, 3 January 2025 (UTC) Suss SB6-8E We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC) ICP1 Down The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST) News & Announcements News from the U.C. Santa Barbara Nanofabrication Facility. DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons - $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara. $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries. // Demis D. John 16:32, 23 September 2024 (PDT) NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education" is one of 6 projects funded by an Intel-NSF partnership. The project builds on the existing "Cleanroom Bootcamps" already being run twice a year in the CNSI QSF cleanroom. // Demis D. John 13:15, 14 August 2024 (PDT) CHIPS Act Award Announced to USC and UCSB NanoFab U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. -- Demis 12:06, 4 October 2023 (PDT) RIE#3 Removed We have removed RIE#3 from the Nanofab, it has gone to the Teaching Cleanroom. All user's processes have been transferred to the Fluorine ICP Etcher. // Demis D. John 15:58, 6 August 2024 (PDT) NanoFab staff awarded Goleta's Innovator of the Year 2023 NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. // Demis D. John 13:58, 7 November 2023 (PST) NanoFab Featured in Regional Tech Videos The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry. See the videos here: Santa Barbara County: This is TechTopia UCSB NanoFab: An Innovation Center // John d 09:26, 1 November 2023 (PST) See older articles at this link General Information NanoFab Users are responsible for understanding their chemistry, risks and usage of various chemicals. Please read the MSDS sheets for the chemicals you use! Users can add qualified processing data to the Wiki pages; see the Editing_Tutorials for how to do that. Supervisors of individuals using the facility, e.g., UCSB Principal Investigators and external user managers are ultimately responsible for ensuring that their supervisees have the appropriate knowledge and training to work safely in the facility. They are also responsible for ensuring that all applicable regulatory requirements are met. This includes having a compliant "Chemical Hygiene Plan" per OSHA regulations. The information on this site should be considered as providing "general supporting information" to the Chemical Hygiene Plan of a particular supervisor. Supervisors can reference all or some of this site information within their Plans. UCSB EH&S can provide assistance to supervisors in preparing their Plans.

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