Template:Announcements: Difference between revisions
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RIE 5 is up except for processes that use SiCl4. |
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The vendor (Oxford) will be on site Tuesday the 10th until Friday the 13th to address various issues with this tool and it will be unavailable for use. -- Millerski |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We have disassembled the entire chamber lid assembly. I have put an order in for all the necessary replacement parts and am waiting to hear back on the lead time for a couple of the items. I should have an update tomorrow. |
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=====Holography/PL: HeCd Laser Down Mon Dec 16th===== |
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Thanks, |
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The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again on Monday Jan 6th (or possibly earlier). |
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We will be installing the refurbished laser which will have higher output power. |
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Holography will be unavailable during this time, but all other PL lasers will be available. |
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=====Lab Shutdown: Dec 26 to Jan 3rd===== |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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We will be shutting down the lab for year end maintenance activities at 7am December 26th. The current plan is to open back up at 7am on January 3rd. We will update the schedule if needed. |
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=====ICP #1 is down===== |
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The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning. |
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During the shutdown this year we will be pulling all cleanroom suits and stocking new suits. |
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-Lee |
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PLEASE REMOVE ALL PERSONAL ITEMS FROM THE GOWNING ROOM PRIOR TO DECEMBER 26TH |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====EBeam3 Planned Maintenance 2/7/24 - 2/8/24===== |
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EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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Please plan accordingly. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST) |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. |
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The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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The ASML will be down for periodic preventative maintenance on Jan 29th-Jan31st, please plan your process accordingly. |
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I will send out an update once we have one. |
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=====Gowning Refresh: Jan 23rd===== |
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Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared. |
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// [[User:John_d|Demis D. John]] |
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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EBeam1 is UP. |
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// |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The |
The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on [https://wiki.nanofab.ucsb.edu/wiki/DUV_Flood_Expose#Documentation:~:text=Exposure%20System%20Spectra-,Documentation,-%5Bedit%20%7C its Wiki page]. |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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-Mobile phone via Symmetry App |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Revision as of 00:35, 8 December 2024
Oxford ALD+Ion Mill
The vendor (Oxford) will be on site Tuesday the 10th until Friday the 13th to address various issues with this tool and it will be unavailable for use. -- Millerski // Demis D. John 00:34, 8 December 2024 (UTC)
Holography/PL: HeCd Laser Down Mon Dec 16th
The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again on Monday Jan 6th (or possibly earlier). We will be installing the refurbished laser which will have higher output power.
Holography will be unavailable during this time, but all other PL lasers will be available. // Demis D. John 17:56, 7 December 2024 (UTC)
Lab Shutdown: Dec 26 to Jan 3rd
We will be shutting down the lab for year end maintenance activities at 7am December 26th. The current plan is to open back up at 7am on January 3rd. We will update the schedule if needed.
During the shutdown this year we will be pulling all cleanroom suits and stocking new suits.
PLEASE REMOVE ALL PERSONAL ITEMS FROM THE GOWNING ROOM PRIOR TO DECEMBER 26TH
//Demis D. John 16:55, 24 November 2024 (UTC)
New Gowns in Jan
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. // Demis D. John 16:58, 24 November 2024 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)