Template:Announcements: Difference between revisions
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=====PECVD2 Planned Down Time for Maintenance 10-19-23===== |
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PECVD2 will be going down on Thursday October 19th for replacement of the hoist. |
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This will be an all day event starting at 8:00am. |
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Please plan accordingly. |
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This was originally planned for 10-2, but we had to reschedule due to other equipment down |
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=====Lab is Open===== |
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=====Raith Velion - Tool Up===== |
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The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am. |
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All suits have been pulled and clean sheets have been put up. All personal items left behind can be found in the boxes in the lobby. |
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- Dan |
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Please sign up for your hanger spot. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:12, 13 October 2023 (PDT) |
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=====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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Please plan your process accordingly. |
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Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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THE LAB IS NOW OPEN FOR BUSINESS |
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//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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Thank you for your patience during shutdown activities. |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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-- [[Peder Lenvik]] |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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//[[User: |
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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===== |
=====New Gowns in Jan===== |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. |
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The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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=====KLA P7 Profilometer: Down===== |
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-Lee |
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The KLA remains down awaiting parts. This part order has been expedited to the extent possible and should be here in the next few days. |
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Thanks |
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//[[User:Mehalana v|Vraj Mehalana]] 13:25, 3 October 2023 (PDT) |
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Bill Millerski |
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=====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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// [[User:John_d|Demis D. John]] 03:30, 3 January 2025 (UTC) |
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The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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=====Oxford ALD+Ion Mill===== |
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//[[User:Mehalana v|Vraj Mehalana]] 10:29, 26 September 2023 (PDT) |
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Unfortunately, we are still experiencing issues with the tool and it remains unavailable. This tool issue remains my highest priority, and we are working closely with the vendor to try and resolve this issue as soon as possible. -- Bill Millerski |
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// [[User:John_d|Demis D. John]] 03:29, 3 January 2025 (UTC) |
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===== |
=====Holography/PL: HeCd Laser Down Mon Dec 16th===== |
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The |
The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again soon after Monday Jan 6th. |
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We will be installing the refurbished laser which will have higher output power. |
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(1) 09-30-23 8:00am-5:00pm |
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(2) 10-01-23 8:00am-5:00pm |
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(3) 10-02-23 8:00am-12:00pm |
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Please plan your work activities accordingly. |
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Holography will be unavailable during this time, but all other PL lasers will be available. |
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//[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT) |
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// [[User:John_d|Demis D. John]] 03:28, 3 January 2025 (UTC) |
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===== |
=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next |
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week and will update everyone at that time. |
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I will send out an update once we have one. |
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-Lee |
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-Aidan |
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// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT) |
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Latest revision as of 03:39, 3 January 2025
Lab is Open
All suits have been pulled and clean sheets have been put up. All personal items left behind can be found in the boxes in the lobby.
Please sign up for your hanger spot.
THE LAB IS NOW OPEN FOR BUSINESS
Thank you for your patience during shutdown activities. -- Peder Lenvik
// Demis D. John 03:34, 3 January 2025 (UTC)
New Gowns in Jan
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. // Demis D. John 03:34, 3 January 2025 (UTC)
KLA P7 Profilometer: Down
The KLA remains down awaiting parts. This part order has been expedited to the extent possible and should be here in the next few days.
Thanks Bill Millerski // Demis D. John 03:30, 3 January 2025 (UTC)
Oxford ALD+Ion Mill
Unfortunately, we are still experiencing issues with the tool and it remains unavailable. This tool issue remains my highest priority, and we are working closely with the vendor to try and resolve this issue as soon as possible. -- Bill Millerski // Demis D. John 03:29, 3 January 2025 (UTC)
Holography/PL: HeCd Laser Down Mon Dec 16th
The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again soon after Monday Jan 6th. We will be installing the refurbished laser which will have higher output power.
Holography will be unavailable during this time, but all other PL lasers will be available. // Demis D. John 03:28, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)