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=====ProbeStation scheduled IT maintenance=====
Hello All,


⚫
=====Lab is Open=====
The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates :
10-30-23
10-31-23
Please plan your work activities accordingly.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 11:58, 17 October 2023 (PDT)
=====PECVD2 Planned Down Time for Maintenance 10-19-23=====
PECVD2 will be going down on Thursday October 19th for replacement of the hoist.
This will be an all day event starting at 8:00am.
Please plan accordingly.
This was originally planned for 10-2, but we had to reschedule due to other equipment down


All suits have been pulled and clean sheets have been put up. All personal items left behind can be found in the boxes in the lobby.
//[[User:Mehalana v|Vraj Mehalana]] 15:18, 12 October 2023 (PDT)
=====Raith Velion - Tool Up=====
The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am.


Please sign up for your hanger spot.
- Dan


THE LAB IS NOW OPEN FOR BUSINESS
//[[User:Mehalana v|Vraj Mehalana]] 10:12, 13 October 2023 (PDT)
=====Unaxis ICP-PECVD is UP for Non-GapFill=====
Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available.
Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run.
Please plan your process accordingly.
Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed.


Thank you for your patience during shutdown activities.
//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT)
-- [[Peder Lenvik]]


// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
⚫
=====Wafer Bonder, (Suss SB6-8E)=====
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.


=====New Gowns in Jan=====
//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT)
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use.
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)


===== Dicing Saw Upgrade - Update=====
=====KLA P7 Profilometer: Down=====
The KLA remains down awaiting parts. This part order has been expedited to the extent possible and should be here in the next few days.
The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule.


Thanks
-Lee
Bill Millerski
// [[User:John_d|Demis D. John]] 03:30, 3 January 2025 (UTC)


=====Oxford ALD+Ion Mill=====
//[[User:Mehalana v|Vraj Mehalana]] 13:25, 3 October 2023 (PDT)
Unfortunately, we are still experiencing issues with the tool and it remains unavailable. This tool issue remains my highest priority, and we are working closely with the vendor to try and resolve this issue as soon as possible. -- Bill Millerski
=====Stepper #1 (GCA 6300) Scheduled Maintenance=====
// [[User:John_d|Demis D. John]] 03:29, 3 January 2025 (UTC)
The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date.


=====Holography/PL: HeCd Laser Down Mon Dec 16th=====
//[[User:Mehalana v|Vraj Mehalana]] 10:29, 26 September 2023 (PDT)
The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again soon after Monday Jan 6th.
We will be installing the refurbished laser which will have higher output power.


Holography will be unavailable during this time, but all other PL lasers will be available.
=====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance=====
// [[User:John_d|Demis D. John]] 03:28, 3 January 2025 (UTC)
The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times:
(1) 09-30-23 8:00am-5:00pm
(2) 10-01-23 8:00am-5:00pm
(3) 10-02-23 8:00am-12:00pm
Please plan your work activities accordingly.


⚫
=====Suss SB6-8E=====
//[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT)
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.


I will send out an update once we have one.
⚫
===== EVG is down=====
-Aidan
We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)
week and will update everyone at that time.


=====ICP1 Down=====
-Lee
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


//[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT)
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Latest revision as of 03:39, 3 January 2025

Lab is Open

All suits have been pulled and clean sheets have been put up. All personal items left behind can be found in the boxes in the lobby.

Please sign up for your hanger spot.

THE LAB IS NOW OPEN FOR BUSINESS

Thank you for your patience during shutdown activities. -- Peder Lenvik

// Demis D. John 03:34, 3 January 2025 (UTC)

New Gowns in Jan

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. // Demis D. John 03:34, 3 January 2025 (UTC)

KLA P7 Profilometer: Down

The KLA remains down awaiting parts. This part order has been expedited to the extent possible and should be here in the next few days.

Thanks Bill Millerski // Demis D. John 03:30, 3 January 2025 (UTC)

Oxford ALD+Ion Mill

Unfortunately, we are still experiencing issues with the tool and it remains unavailable. This tool issue remains my highest priority, and we are working closely with the vendor to try and resolve this issue as soon as possible. -- Bill Millerski // Demis D. John 03:29, 3 January 2025 (UTC)

Holography/PL: HeCd Laser Down Mon Dec 16th

The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again soon after Monday Jan 6th. We will be installing the refurbished laser which will have higher output power.

Holography will be unavailable during this time, but all other PL lasers will be available. // Demis D. John 03:28, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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