Dry Etching Recipes: Difference between revisions

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Revision as of 23:32, 6 August 2025

See above linked page for process control data (dep rate/stress etc. over time), for a selection of often-used dry etches

The Key/Legend for this table's A...R6 values is at the bottom of the page.

Processes in the table above are ranked by their "Process Maturity Level" as follows:

Process Level	Description of Process Level Ranking
A	Process Allowed and materials available but never done
R1	Process has been run at least once
R2	Process has been run and/or procedure is documented or/and data available
R3	Process has been run, procedure is documented, and data is available
R4	Process has a documented procedure with regular (≥4x per year) data or lookahead/in-situ control available
R5	Process has a documented procedure with regular (≥4x per year) data and lookahead/in-situ control available
R6	Process has a documented procedure, regular ( ≥4x per year) data, and control charts & limits available

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 ===Dry Etching Tools/Materials Table===
-==== Process Maturity Rank ====
+==== Process Maturity Ranking ====
 * <code>'''R6'''</code> - most mature process with regular calibrations recorded on SPC charts.
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 |}
-==='''Process Ranking Table'''===
+===Process Ranking Table===
 Processes in the table above are ranked by their "''Process Maturity Level''" as follows:
 {| class="wikitable"