E-Beam Evaporation Recipes: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
← Older edit
Content deleted Content added
VisualWikitext
→Materials Table (E-Beam #4): made table sortable, removed header row for sorting
Barreraz (talk | contribs)
staff
74 edits
 
(10 intermediate revisions by 6 users not shown)
Line 1: Line 1:
{{recipes|Vacuum Deposition}}
{{recipes|Vacuum Deposition}}
= Vapor Pressure Chart and Materials Deposition Table =
=Vapor Pressure Chart and Materials Deposition Table=

*[[media:Vapor-Pressure-Chart-2.xlsx|Vapor Pressure of Metals (Excel)]]
*[[Media:Vapor-Pressure-Chart-2.xlsx|Vapor Pressure of Metals (Excel)]]
*[http://www.lesker.com/newweb/deposition_materials/MaterialDeposition.cfm?pgid=0#| Lesker Deposition Table]
*[http://www.lesker.com/newweb/deposition_materials/MaterialDeposition.cfm?pgid=0#| Lesker Deposition Table]


=Aluminum Deposition=
=Aluminum Deposition=
*[[media:Al-thickness-variation-with-rate.jpg|Al thickness change with deposition rate]]


*[[Media:Al-thickness-variation-with-rate.jpg|Al thickness change with deposition rate]]
*[[media:Al-AFM-Variation-Deposition-Rate-Rev1.pdf|Morphology Variation with Deposition Rate - Ebeam 1]]

*[[Media:Al-AFM-Variation-Deposition-Rate-Rev1.pdf|Morphology Variation with Deposition Rate - Ebeam 1]]


=[[E-Beam 1 (Sharon)]]=
=[[E-Beam 1 (Sharon)]]=
==Ar-Ion Beam Source==
==Ar-Ion Beam Source==

*[[media:argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf|Procedure and data for ion-mill in ebeam1]]
*[[Media:Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf|Procedure and data for ion-mill in ebeam1]]


==Materials Table (E-Beam #1)==
==Materials Table (E-Beam #1)==
''There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum.''
''There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum. Now able to handle Four-4" wafers in one run.''
{| class="collapsible wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
|-
! colspan="8" width="1100" height="35" align="center" bgcolor="#D0E7FF" |<div style="font-size: 150%;">Materials Table</div>
|- bgcolor="#D0E7FF"
|- bgcolor="#D0E7FF"
! width="75" align="center" bgcolor="#D0E7FF" | '''Material'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Material'''
! width="75" align="center" bgcolor="#D0E7FF" | '''Position'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Position'''
! width="75" align="center" bgcolor="#D0E7FF" | '''Hearth / Crucible'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Hearth / Crucible'''
! width="85" align="center" bgcolor="#D0E7FF" | '''Film Number'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Density'''
! width="75" align="center" bgcolor="#D0E7FF" | '''Density'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Z Ratio'''
! width="75" align="center" bgcolor="#D0E7FF" | '''Z Ratio'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Tooling'''
! width="75" align="center" bgcolor="#D0E7FF" | '''Tooling'''
! width="500" bgcolor="#D0E7FF" align="center" |'''Comments'''
! width="500" align="center" bgcolor="#D0E7FF" | '''Comments'''
|-
|-
| Ag
|Ag
|7 (6, 7, 8)
| 4
| C
|C
| 5
|10.5
| 10.5
|0.529
|110
| 0.529
|
| 140
|
|-
|-
| Al
|Al
| 2
|1
| C
|C
| 6
|2.7
| 2.7
|1.080
|102
| 1.080
|
| 118
|
|-
|-
| Al<sub>2</sub>O<sub>3</sub>
|Al<sub>2</sub>O<sub>3</sub>
|(6, 7, 8)
| 1
| C
|C
|3.97
| 6
| 3.97
|0.336
|
| 0.336
|
| 169
|
|-
|-
| Au
|Au
| 4
|3
| C
|C
|19.3
| 4
| 19.3
|0.381
|92
| 0.381
|Bazookas can be used at 20-30Å/sec.
| 138
| Bazookas can be used at 20-30Å/sec.
|-
|-
| AuGe
|AuGe
|(6, 7, 8)
| 3
| C
|C
|17.63
| 5
| 17.63
|0.397
|
| 0.397
|Composition unpredictable unless you practically empty the crucible.
| 151
| Composition unpredictable unless you practically empty the crucible.
|-
|-
|C
|C
|(6, 7, 8)
|2
|H
|H
|2
|2.250
|2.250
|3.260
|3.260
|150
|
|Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission.
|Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission.
|-
|-
|Co
|Co
|(6, 7, 8)
| 2
| C
|C
| 1
|8.9
| 8.9
|0.343
|
| 0.343
|'''Use only with permission'''
| 150
| '''Use only with permission'''
|-
|-
| Fe
|Fe
|(6, 7, 8)
|
|
|
|7.86
|
| 7.86
|0.349
|
| 0.349
|
|
|
|-
|-
| Ge
|Ge
|8 (6, 7, 8)
| 3
| C
|C
|5.35
| 6
| 5.35
|0.516
|
| 0.516
|
| 130
|
|-
|-
| Gd
|Gd
|(6, 7, 8)
| 3
| H
|H
|7.89
| 3
| 7.89
|0.670
|
| 0.670
| 120
|'''Use only with permission'''
|'''Use only with permission'''
|
|
|-
|-
| MgO
|MgO
|(6, 7, 8)
| 1
|
|
|3.58
| 6
| 3.58
|0.411
|
| 0.411
|'''Use only with permission'''
|
| '''Use only with permission'''
|-
|-
| Mo
|Mo
|(6, 7, 8)
|
|
|
|10.2
|
| 10.2
|0.257
|
| 0.257
|
| 140
|
|-
|-
| Ni
|Ni
| 1
|5
| H
|H
|8.91
| 1
| 8.91
|0.331
|104
| 0.331
|Prone to spitting. Cool down for 15 minutes before venting.
| 140
| Prone to spitting. Cool down for 15 minutes before venting.
|-
|-
| NiCr
|NiCr
|(6, 7, 8)
| 1
| H
|H
|8.50
| 6
| 8.50
|0.3258
|
| 0.3258
|Density and z-ratio for Nichrome IV
|
| Density and z-ratio for Nichrome IV
|-
|-
| Nb
|Nb
|(6, 7, 8)
| 4
| C
|C
|8.57
| 6
|0.516 ( should be 0.492)
| 8.57
|
| 0.516 ( should be 0.492)
|Cool down for at least 35 minutes before venting.
|
| Cool down for at least 35 minutes before venting.
|-
|-
| Pd
|Pd
|6 (6, 7, 8)
| 1
| H
|H
|12.0
| 9
|0.357
| 12.0
|112
| 0.357
|
| 140
|
|-
| Pt
| 1
| C
| 8
| 21.40
| 0.245
| 140
| Prone to spitting. Evaporate at 1.5Å/sec or less.
|-
| Ru
| 1
| C
| 6
| 12.362
| 0.182
| 142
| Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting.
|-
|-
| Si
|Pt
| 2
|4
| H
|C
|21.40
| 2
| 2.32
|0.245
|100
| 0.712
|Prone to spitting. Evaporate at 1.5Å/sec or less.
| 150
| Cool down very slowly after evaporating lest you crack the source.
|-
| SiO
|
| C
| 6
| 2.13
| 0.87
| 132
| '''Use only with permission'''
|-
| SiO<sub>2</sub>
| 1
| C
| 6
| 2.648
| 1.00
| 140
| '''Use only with permission.'''
Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table.
|-
| SrF<sub>2</sub>
| 1
| C
| 6
| 4.28
| 0.727
| 140
| '''Use only with permission'''
|-
| Ta
| 1
| H
| 6
| 16.6
| 0.262
|
| Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta.
|-
| W
| 1
| C
| 6
| 19.3
| 0.163
| 138
|
|-
| Ti
| 3
| H
| 3
| 4.50
| 0.628
| 139
|
|}

=[[E-Beam 2 (Custom)]]=
==Materials Table (E-Beam #2)==
{| class="collapsible wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
|-
! colspan="5" width="1300" height="35" align="center" bgcolor="#D0E7FF" |<div style="font-size: 150%;">Materials Table</div>
|- bgcolor="#D0E7FF"
! width="45" align="center" bgcolor="#D0E7FF" | '''Material'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Tooling factor, %'''
! width="100" align="center" bgcolor="#D0E7FF" | '''Comments'''
|-
|-
|Ru
|Al<sub>2</sub>O<sub>3</sub>
|(6, 7, 8)
|3.97
|C
|0.336
|140.0
|12.362
|0.182
|Tony could you please check this?
|-
|CeO<sub>2</sub>
|7.13
|1.000
|252.0
|Deposition at room temperature (see the details in the following file)
|-
|CeO<sub>2</sub>
|7.13
|1.000
|117.0
|Deposition at 200 C (see the details in the following file)
|-
|CeO<sub>2</sub>
|7.13
|1.000
|99.7
|Deposition at 250 C (see the details in the following file)
|-
|GeO<sub>2</sub>
|6.24
|1.000
|139.0
|
|
|Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting.
|-
|ITO
|6.43-7.14
|1.000
|139.0
|z ratio unknown
|-
|MgO
|3.58
|0.411
|157.6
|OK
|-
|-
|Si
|Si
|(6, 7, 8)
|H
|2.32
|2.32
|0.712
|0.712
|150.0
|
|
|Cool down very slowly after evaporating lest you crack the source.
|-
|-
|SiO<sub>2</sub>
|SiO
|(6, 7, 8)
|2.648
|C
|1.000
|157.6
|Density 2.2-2.7 according to thin film deposition tables
|-
|SiO<sub>x</sub>
|2.13
|2.13
|0.87
|0.87
|130.0
|
|
|'''Use only with permission'''
|-
|SiO<sub>2</sub>
|(6, 7, 8)
|C
|2.648
|1.00
|
|'''Use only with permission.'''
Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table.
|-
|-
|SrF<sub>2</sub>
|SrF<sub>2</sub>
|(6, 7, 8)
|C
|4.28
|4.28
|0.727
|0.727
|140.0
|
|
|'''Use only with permission'''
|-
|-
|Ta
|Ta<sub>2</sub>O<sub>5</sub>
|(6, 7, 8)
|8.2
|H
|0.30
|157.6
|16.6
|0.262
|
|
|Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta.
|-
|-
|W
|TiO<sub>2</sub>
|(6, 7, 8)
|4.26
|C
|0.400
|139.0
|19.3
|0.163
|
|
|-
|Ti
|2
|H
|4.50
|0.628
|109
|
|-
|Zr
|(6, 7, 8)
|C
|6.49
|0.600
|150
|
|
|-
|-
|}
|}

=[[E-Beam 2 (Custom)]]=
==Materials Table (E-Beam #2)==
[[File:EB2 Materials Table.png|none|thumb|738x738px]]


==ITO deposition (E-Beam 2)==
==ITO deposition (E-Beam 2)==

*[[media:Rapid Thermal Annealing on Room-temperature grown ITO.pdf|Room-temperature ITO Deposition, Annealing, and Electrical and Optical Properties]]
*[[Media:Rapid Thermal Annealing on Room-temperature grown ITO.pdf|Room-temperature ITO Deposition, Annealing, and Electrical and Optical Properties]]
*[[media:ITO film-200C-O2-35sccm-EBeam2.pdf|ITO Deposition at 200 C]]
*[[Media:ITO film-200C-O2-35sccm-EBeam2.pdf|ITO Deposition at 200 C]]


==CeO<sub>2</sub> deposition (E-Beam 2)==
==CeO<sub>2</sub> deposition (E-Beam 2)==

*[[media:CeO2 Deposition-EBeam2.pdf|Room- and High-temperature CeO<sub>2</sub> Depositions with and without an Additional Oxygen Gas Flow]]
*[[Media:CeO2 Deposition-EBeam2.pdf|Room- and High-temperature CeO<sub>2</sub> Depositions with and without an Additional Oxygen Gas Flow]]


=[[E-Beam 3 (Temescal)]]=
=[[E-Beam 3 (Temescal)]]=
Line 361: Line 259:
|-
|-
|- bgcolor="#D0E7FF"
|- bgcolor="#D0E7FF"
! width="45" align="center" bgcolor="#D0E7FF" | '''Material'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Material'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Gun'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Gun'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Hearth /Crucible'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Hearth /Crucible'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Process Gain, A/sec/%pwr'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Process Gain, A/sec/%pwr'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Film Number'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Film Number'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Density, g/cm3'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Z Ratio'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Tooling, %'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Tooling, %'''
! width="100" align="center" bgcolor="#D0E7FF" | '''Comments'''
! width="100" bgcolor="#D0E7FF" align="center" |'''Comments'''
|-
|-
| Au
|Au
| Front
|Front
| C
|C
| 2.0
|2.0
| 3
|3
|19.30
|19.30
| 0.381
|0.381
| 56
|56
|
|
|-
|-
| Ni
|Ni
| Front
|Front
| C
|C
| 0.5
|0.5
| 2
|2
|8.91
|8.91
| 0.331
|0.331
| 67
|67
|
|
|-
|-
| Pt
|Pt
| Front
|Front
| C
|C
| 0.4
|0.4
| 1
|1
|21.40
|21.40
| 0.245
|0.245
| 67
|67
|
|
|-
|-
| Ti
|Ti
| Front
|Front
| C
|C
| 5.0
|5.0
| 4
|4
|4.50
|4.50
| 0.628
|0.628
| 67
|67
|
|
|-
|-
|Ag
|Ag
| Rear
|Rear
| C
|C
| 10.0
|10.0
| 2
|2
|10.50
|10.50
| 0.529
|0.529
| 67
|67
|
|
|-
|-
| Al
|Al
| Rear
|Rear
| C
|C
| 10.0
|10.0
| 1
|1
|2.70
|2.70
| 1.080
|1.080
| 53
|53
|
|
|-
|-
| Ge
|Ge
| Rear
|Rear
| C
|C
| 10.0
|10.0
| 3
|3
|5.35
|5.35
| 0.516
|0.516
| 80
|80
|
|
|-
|-
| Pd
|Pd
| Rear
|Rear
| C
|C
| 0.9
|0.9
| 4
|4
|12.038
|12.038
| 0.357
|0.357
| 48
|48
|
|
|-
|-
Line 457: Line 355:
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
|- bgcolor="#D0E7FF"
|- bgcolor="#D0E7FF"
! width="45" align="center" bgcolor="#D0E7FF" | '''Material'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Material'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Density, g/cm3'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Z Ratio'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Master tooling, %'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Master tooling, %'''
! width="45" align="center" bgcolor="#D0E7FF" | '''Process Gain, A/sec/%pwr'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Process Gain, A/sec/%pwr'''
! width="100" align="center" bgcolor="#D0E7FF" | '''Comments'''
! width="100" bgcolor="#D0E7FF" align="center" |'''Comments'''
|-
|-
|Ag
|Au
|Front
| 10.50
|C
| 0.529
|110
|2.0
|3
|10.0
|19.30
|0.381
|56
|
|
|-
|-
|Al
|Ni
|Front
| 2.70
|C
| 1.080
|165
|0.5
|6.0
|2
|8.91
|0.331
|67
|
|
|-
|-
|Au
|Pt
|Front
|19.30
|C
| 0.381
|120
|0.4
|1
|10.0
|21.40
|0.245
|67
|
|
|-
|-
|Co
|Ti
|Front
|8.90
|C
| 0.343
|150
|5.0
|5.0
|4
|4.50
|0.628
|67
|
|
|-
|-
|Cr
|Ag
|Rear
|7.20
|C
| 0.305
|140
|10.0
|10.0
|2
|10.50
|0.529
|67
|
|
|-
|-
|Fe
|Al
|Rear
|7.86
|C
| 0.349
|165
|10.0
|10.0
|1
|2.70
|1.080
|53
|
|
|-
|-
|Ge
|Ge
|Rear
|5.35
|C
| 0.516
|126
|10.0
|
|-
|Hf
|13.09
| 0.360
|150
|10.0
|
|-
|Ir
|22.40
| 0.129
|130
|10.0
|
|-
|Ni
|8.91
| 0.331
|150
|5.0
|
|-
|NiCr
|8.50
| 0.3258
|140
|10.0
|density and z ratio for Nichrome IV
|-
|NiFe
|8.70
|1.000
|100
|10.0
|10.0
|3
|5.35
|0.516
|80
|
|
|-
|-
|Pd
|Pd
|Rear
|C
|0.9
|4
|12.038
|12.038
|0.357
|0.357
|112
|48
|10.0
|
|-
|Pt
|21.40
|0.245
|130
|10.0
|
|-
|Ru
|12.362
|0.182
|100
|10.0
|
|-
|Ti
|4.50
|0.628
|183
|10.0
|
|-
|Zr
|6.49
|0.600
|150
|10.0
|
|
|-
|-

Latest revision as of 15:02, 21 January 2026

Back to Vacuum Deposition Recipes.

Vapor Pressure Chart and Materials Deposition Table

Aluminum Deposition

E-Beam 1 (Sharon)

Ar-Ion Beam Source

Materials Table (E-Beam #1)

There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum. Now able to handle Four-4" wafers in one run.

Material Position Hearth / Crucible Density Z Ratio Tooling Comments
Ag 7 (6, 7, 8) C 10.5 0.529 110
Al 1 C 2.7 1.080 102
Al2O3 (6, 7, 8) C 3.97 0.336
Au 3 C 19.3 0.381 92 Bazookas can be used at 20-30Å/sec.
AuGe (6, 7, 8) C 17.63 0.397 Composition unpredictable unless you practically empty the crucible.
C (6, 7, 8) H 2.250 3.260 Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission.
Co (6, 7, 8) C 8.9 0.343 Use only with permission
Fe (6, 7, 8) 7.86 0.349
Ge 8 (6, 7, 8) C 5.35 0.516
Gd (6, 7, 8) H 7.89 0.670 Use only with permission
MgO (6, 7, 8) 3.58 0.411 Use only with permission
Mo (6, 7, 8) 10.2 0.257
Ni 5 H 8.91 0.331 104 Prone to spitting. Cool down for 15 minutes before venting.
NiCr (6, 7, 8) H 8.50 0.3258 Density and z-ratio for Nichrome IV
Nb (6, 7, 8) C 8.57 0.516 ( should be 0.492) Cool down for at least 35 minutes before venting.
Pd 6 (6, 7, 8) H 12.0 0.357 112
Pt 4 C 21.40 0.245 100 Prone to spitting. Evaporate at 1.5Å/sec or less.
Ru (6, 7, 8) C 12.362 0.182 Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting.
Si (6, 7, 8) H 2.32 0.712 Cool down very slowly after evaporating lest you crack the source.
SiO (6, 7, 8) C 2.13 0.87 Use only with permission
SiO2 (6, 7, 8) C 2.648 1.00 Use only with permission.

Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table.

SrF2 (6, 7, 8) C 4.28 0.727 Use only with permission
Ta (6, 7, 8) H 16.6 0.262 Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta.
W (6, 7, 8) C 19.3 0.163
Ti 2 H 4.50 0.628 109
Zr (6, 7, 8) C 6.49 0.600 150

E-Beam 2 (Custom)

Materials Table (E-Beam #2)

ITO deposition (E-Beam 2)

CeO2 deposition (E-Beam 2)

E-Beam 3 (Temescal)

Materials Table (E-Beam #3)

The following materials are always installed in the evaporator. There are 4 materials available on each gun (front/rear guns), allowing for co-deposition by running both guns simultaneously.

Material Gun Hearth /Crucible Process Gain, A/sec/%pwr Film Number Density, g/cm3 Z Ratio Tooling, % Comments
Au Front C 2.0 3 19.30 0.381 56
Ni Front C 0.5 2 8.91 0.331 67
Pt Front C 0.4 1 21.40 0.245 67
Ti Front C 5.0 4 4.50 0.628 67
Ag Rear C 10.0 2 10.50 0.529 67
Al Rear C 10.0 1 2.70 1.080 53
Ge Rear C 10.0 3 5.35 0.516 80
Pd Rear C 0.9 4 12.038 0.357 48

E-Beam 4 (CHA)

Materials Table (E-Beam #4)

Material Density, g/cm3 Z Ratio Master tooling, % Process Gain, A/sec/%pwr Comments
Au Front C 2.0 3 19.30 0.381 56
Ni Front C 0.5 2 8.91 0.331 67
Pt Front C 0.4 1 21.40 0.245 67
Ti Front C 5.0 4 4.50 0.628 67
Ag Rear C 10.0 2 10.50 0.529 67
Al Rear C 10.0 1 2.70 1.080 53
Ge Rear C 10.0 3 5.35 0.516 80
Pd Rear C 0.9 4 12.038 0.357 48
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=E-Beam_Evaporation_Recipes&oldid=163601"