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Equipment Info Recipes + Processes Data + Info Other Links: SignUpMonkey Get into the Lab Fabrication Services Internships NanoTech Homepage NanoFab Job Postings Directions + Parking UCSB ECE Dept. Lithography Deposition Dry Etch Wet Process Thermal Process Packaging/Bonding Metrology/Test Lithography Deposition Dry Etching Wet Etching Thermal Process Packaging/Bonding Process Control Data Tutorials ← NEW Calculators + Utilities Nanofab Data + Info Research + Publications Tech Talks Announcements moved Please check the announcements in SignupMonkey for equipment notifications. // Demis D. John 02:03, 27 November 2025 (UTC) News & Announcements News from the U.C. Santa Barbara Nanofabrication Facility. "Make Microchips!" - new book by Nanofab staff Nanofab staff Demis D. John published an intro-level book for people wanting to learn about making microchips, it is available now. The book compliments the Cleanroom Bootcamps and other workforce development efforts Demis has launched, to help people get into the semiconductor industry. // Demis D. John 15:30, 22 August 2026 (UTC) Carpinteria Highschool does Microchip Packaging The SB Chamber of Commerce sponsored Carpinteria Highschool to do microchip packaging using their machine shop in the CHIP program! Under the mentorship of Nanofab staff Demis D. John and Ben Werner from PseudolithIC, 3 student teams designed the microchip packaging for micro-pressure sensors, MEMS chips made during the CC-PRIME cleanroom bootcamps. The SBSC Chamber released a video about the program here, you can learn more at this article. // Demis D. John 10:00, 13 August 2026 (UTC) Raith PicoMaster Direct-Write Installed We have installed a new H-Line (405nm) Direct-write tool: The Maskless_Aligner_(Raith_PicoMaster_XF). The new tool is currently undergoing staff qualifications and we are developing operating procedures. // Demis D. John 19:02, 18 July 2026 (UTC) ProtoFab Opening Summer 2026 The Nanofab is launching a Prototyping Facility called the "Protofab", which is located at UCSB's new OASIS building. Learn more at https://protofab.oasis.ucsb.edu The new lab will enable taking your diced chips from the Nanofab, to the Protofab where you can wirebond, attach to PCB's/carriers, align+attach optical fibers etc., to make a real "prototype". The lab is expected to open in Summer 2026, with equipment currently being installed. Access & model is similar to the Nanofab - anyone can pay an hourly fee to go into the Protofab, using key fobs for access. (OASIS "Membership" is not required to use the Protofab, unless you also want your own desk + private lab space at OASIS.) Contact the Protofab lab manager Arin Abed for more information. // Demis D. John 19:51, 27 May 2026 (UTC) CS MANTECH Poster: "Machine Matching Methodology for Single-shot Lab to Lab Dry Etch Process Transfer" Nanofab staff Foong Fatt, Noah Dutra and Brian Thibeault presented a poster at CS MANTECH (compound semiconductor manufacturing technology) in Portland Oregon. The paper describes using PDF Solutions Exensio analytics to do a single-shot dry etch process transfer from the UCSB Nanofab's Oxford Cobra ICP etcher to a different-configuration ICP etcher at UC San Diego's, reproducing etch rate and sidewall profile in a single-shot. The technique used complimentary L9 DOE's at each site to map out the process space, allowing for single-shot matching. See the full paper here. // Demis D. John 15:53, 22 August 2026 (UTC) DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons - $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara. $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries. // Demis D. John 16:32, 23 September 2024 (PDT) NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education" is one of 6 projects funded by an Intel-NSF partnership. The project builds on the existing "Cleanroom Bootcamps" already being run twice a year in the CNSI QSF cleanroom. // Demis D. John 13:15, 14 August 2024 (PDT) CHIPS Act Award Announced to USC and UCSB NanoFab U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. -- Demis 12:06, 4 October 2023 (PDT) RIE#3 Removed We have removed RIE#3 from the Nanofab, it has gone to the Teaching Cleanroom. All user's processes have been transferred to the Fluorine ICP Etcher. // Demis D. John 15:58, 6 August 2024 (PDT) NanoFab staff awarded Goleta's Innovator of the Year 2023 NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. // Demis D. John 13:58, 7 November 2023 (PST) NanoFab Featured in Regional Tech Videos The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry. See the videos here: Santa Barbara County: This is TechTopia UCSB NanoFab: An Innovation Center // John d 09:26, 1 November 2023 (PST) See older articles at this link General Information NanoFab Users are responsible for understanding their chemistry, risks and usage of various chemicals. Please read the MSDS sheets for the chemicals you use! Users can add qualified processing data to the Wiki pages; see the Editing_Tutorials for how to do that. Supervisors of individuals using the facility, e.g., UCSB Principal Investigators and external user managers are ultimately responsible for ensuring that their supervisees have the appropriate knowledge and training to work safely in the facility. They are also responsible for ensuring that all applicable regulatory requirements are met. This includes having a compliant "Chemical Hygiene Plan" per OSHA regulations. The information on this site should be considered as providing "general supporting information" to the Chemical Hygiene Plan of a particular supervisor. Supervisors can reference all or some of this site information within their Plans. UCSB EH&S can provide assistance to supervisors in preparing their Plans.

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