Revision as of 18:08, 13 August 2012

Surface Analysis (KLA/Tencor Surfscan)

Tool Type	Inspection, Test and Characterization
Location	Bay 5

Description	?
Manufacturer	Tencor

About

Revision as of 17:34, 8 August 2012 (view source) Biljana (talk \| contribs) (→‎Documentation) ← Older edit		Revision as of 18:08, 13 August 2012 (view source) Biljana (talk \| contribs) (→‎Documentation) Newer edit →
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	= Documentation =		= Documentation =

	[[Operating Instruction Manual]]		*[[media:SurfScan 6200-Operating MAnual.pdf\|Operating Instruction Manual]]