RIE Etching Recipes: Difference between revisions
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==GaN Etching (RIE 5)== |
==GaN Etching (RIE 5)== |
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*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes - Cl<sub>2</sub>-BCl<sub>3</sub>-Ar]] |
*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes - Cl<sub>2</sub>-BCl<sub>3</sub>-Ar]] |
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=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
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Revision as of 16:57, 23 October 2013
Back to Dry Etching Recipes.