RIE Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
|||
| Line 6: | Line 6: | ||
=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
||
==InP-InGaAsP-InGaAlAs Etching (RIE 5)== |
|||
*[[media:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf|InP-InGaAsP-InAlGaAs Etch Recipes - CH<sub>4</sub>-H<sub>2</sub>-Ar]] |
|||
=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
||
Revision as of 23:40, 23 October 2013
Back to Dry Etching Recipes.