RIE Etching Recipes: Difference between revisions
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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==AlGaAs Etching (RIE 5)== |
==AlGaAs\GaAs Etching (RIE 5)== |
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*[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|AlGaAs Etch Recipes - BCl<sub>3</sub>-SiCl<sub>4</sub>]] |
*[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|GaAs\AlGaAs Etch Recipes - BCl<sub>3</sub>-SiCl<sub>4</sub>]] |
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==GaN Etching (RIE 5)== |
==GaN Etching (RIE 5)== |
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Revision as of 00:09, 24 October 2013
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