PECVD1 Recipes: Difference between revisions
Jump to navigation
Jump to search
| Line 2: | Line 2: | ||
== SiN deposition (PECVD #1) == |
== SiN deposition (PECVD #1) == |
||
*[[media:PECVD1-SiN-standard recipe 2014.pdf|SiN Standard Recipe]] |
*[[media:PECVD1-SiN-standard recipe 2014.pdf|SiN Standard Recipe]] |
||
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEN6LV93LXlnbUhIWU1adVZWMWlXYnc&usp=drive_web#gid=sharing SiN Data |
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEN6LV93LXlnbUhIWU1adVZWMWlXYnc&usp=drive_web#gid=sharing SiN Data May 2014] |
||
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dElmTXZyOEZsOFdrMVhNLWpKXzVmNWc&usp=sharing SiN 1000A Thickness uniformity 2014] |
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dElmTXZyOEZsOFdrMVhNLWpKXzVmNWc&usp=sharing SiN 1000A Thickness uniformity 2014] |
||
<!-- Placeholders - Not uploaded yet--> |
<!-- Placeholders - Not uploaded yet--> |
||
Revision as of 01:52, 22 May 2014
PECVD 1 (PlasmaTherm 790)
SiN deposition (PECVD #1)
- SiN Standard Recipe
- SiN Data May 2014
- SiN 1000A Thickness uniformity 2014
- Low Stress Si3N4 - Variable Stress Recipes
- Low Stress Si3N4 - Variable Stress Plot
- Deposition rate~11.21nm/min
- HF e.r.~87nm/min
- Stress~476MPa
- Refractive Index~1.936
SiO2 deposition (PECVD #1)
- Deposition rate~35.73nm/min
- HF e.r.~610nm/min
- Stress~-402MPa
- Refractive Index~1.460