E-Beam Evaporation Recipes: Difference between revisions
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(→Materials Table (E-Beam #2): note that data is outdated) |
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(3 intermediate revisions by 2 users not shown) | |||
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{{recipes|Vacuum Deposition}} |
{{recipes|Vacuum Deposition}} |
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= |
=Vapor Pressure Chart and Materials Deposition Table= |
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*[[media:Vapor-Pressure-Chart-2.xlsx|Vapor Pressure of Metals (Excel)]] |
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*[[Media:Vapor-Pressure-Chart-2.xlsx|Vapor Pressure of Metals (Excel)]] |
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*[http://www.lesker.com/newweb/deposition_materials/MaterialDeposition.cfm?pgid=0#| Lesker Deposition Table] |
*[http://www.lesker.com/newweb/deposition_materials/MaterialDeposition.cfm?pgid=0#| Lesker Deposition Table] |
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=Aluminum Deposition= |
=Aluminum Deposition= |
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*[[media:Al-thickness-variation-with-rate.jpg|Al thickness change with deposition rate]] |
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*[[Media:Al-thickness-variation-with-rate.jpg|Al thickness change with deposition rate]] |
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*[[media:Al-AFM-Variation-Deposition-Rate-Rev1.pdf|Morphology Variation with Deposition Rate - Ebeam 1]] |
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*[[Media:Al-AFM-Variation-Deposition-Rate-Rev1.pdf|Morphology Variation with Deposition Rate - Ebeam 1]] |
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=[[E-Beam 1 (Sharon)]]= |
=[[E-Beam 1 (Sharon)]]= |
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==Ar-Ion Beam Source== |
==Ar-Ion Beam Source== |
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*[[media:argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf|Procedure and data for ion-mill in ebeam1]] |
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*[[Media:Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf|Procedure and data for ion-mill in ebeam1]] |
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==Materials Table (E-Beam #1)== |
==Materials Table (E-Beam #1)== |
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{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
||
|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
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! width="75" |
! width="75" bgcolor="#D0E7FF" align="center" |'''Material''' |
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! width="75" |
! width="75" bgcolor="#D0E7FF" align="center" |'''Position''' |
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! width="75" |
! width="75" bgcolor="#D0E7FF" align="center" |'''Hearth / Crucible''' |
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! width=" |
! width="75" bgcolor="#D0E7FF" align="center" |'''Density''' |
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! width="75" |
! width="75" bgcolor="#D0E7FF" align="center" |'''Z Ratio''' |
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! width="75" |
! width="75" bgcolor="#D0E7FF" align="center" |'''Tooling''' |
||
! width=" |
! width="500" bgcolor="#D0E7FF" align="center" |'''Comments''' |
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! width="500" align="center" bgcolor="#D0E7FF" | '''Comments''' |
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|- |
|- |
||
| |
|Ag |
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|7 (6, 7, 8) |
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| 4 |
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| |
|C |
||
| |
|10.5 |
||
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|0.529 |
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|110 |
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| 0.529 |
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| |
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| 140 |
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| |
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|- |
|- |
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| |
|Al |
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|1 |
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|C |
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|2.7 |
||
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|1.080 |
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|102 |
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| 1.080 |
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| |
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| 118 |
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| |
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|- |
|- |
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| |
|Al<sub>2</sub>O<sub>3</sub> |
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|(6, 7, 8) |
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| 1 |
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| |
|C |
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|3.97 |
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| 6 |
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|0.336 |
||
| |
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| 0.336 |
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| |
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| 169 |
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| |
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|- |
|- |
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|Au |
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|3 |
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| |
|C |
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|19.3 |
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| 4 |
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| |
|0.381 |
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|92 |
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| 0.381 |
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|Bazookas can be used at 20-30Å/sec. |
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| 138 |
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| Bazookas can be used at 20-30Å/sec. |
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|- |
|- |
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| |
|AuGe |
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|(6, 7, 8) |
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| 3 |
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| |
|C |
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|17.63 |
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| 5 |
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|0.397 |
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| |
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| 0.397 |
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|Composition unpredictable unless you practically empty the crucible. |
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| 151 |
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| Composition unpredictable unless you practically empty the crucible. |
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|- |
|- |
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|C |
|C |
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|(6, 7, 8) |
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|2 |
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|H |
|H |
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|2 |
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|2.250 |
|2.250 |
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|3.260 |
|3.260 |
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| |
| |
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|Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission. |
|Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission. |
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|- |
|- |
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|Co |
|Co |
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|(6, 7, 8) |
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| 2 |
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|C |
||
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|8.9 |
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|0.343 |
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| |
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| 0.343 |
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|'''Use only with permission''' |
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| 150 |
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| '''Use only with permission''' |
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|- |
|- |
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|Fe |
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|(6, 7, 8) |
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| |
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| |
| |
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|7.86 |
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| |
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|0.349 |
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| |
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| 0.349 |
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| |
| |
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|- |
|- |
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|Ge |
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|8 (6, 7, 8) |
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| 3 |
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|C |
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|5.35 |
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| 6 |
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|0.516 |
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| |
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| 0.516 |
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| |
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| 130 |
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| |
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|- |
|- |
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|Gd |
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|(6, 7, 8) |
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| 3 |
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|H |
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|7.89 |
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| 3 |
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|0.670 |
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| |
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| 0.670 |
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| 120 |
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|'''Use only with permission''' |
|'''Use only with permission''' |
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| |
| |
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|- |
|- |
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|MgO |
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|(6, 7, 8) |
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| 1 |
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| |
| |
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|3.58 |
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| 6 |
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|0.411 |
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| |
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| 0.411 |
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|'''Use only with permission''' |
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| |
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| '''Use only with permission''' |
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|- |
|- |
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|Mo |
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|(6, 7, 8) |
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| |
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| |
| |
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|10.2 |
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| |
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|0.257 |
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| |
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| 0.257 |
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| |
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| 140 |
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| |
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|- |
|- |
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|Ni |
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|5 |
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|H |
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|8.91 |
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| 1 |
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|0.331 |
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|104 |
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| 0.331 |
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|Prone to spitting. Cool down for 15 minutes before venting. |
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| 140 |
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| Prone to spitting. Cool down for 15 minutes before venting. |
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|- |
|- |
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| |
|NiCr |
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|(6, 7, 8) |
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| 1 |
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|H |
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|8.50 |
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| 6 |
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|0.3258 |
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| |
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| 0.3258 |
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|Density and z-ratio for Nichrome IV |
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| |
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| Density and z-ratio for Nichrome IV |
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|- |
|- |
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|Nb |
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|(6, 7, 8) |
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| 4 |
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|C |
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|8.57 |
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| 6 |
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|0.516 ( should be 0.492) |
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| 8.57 |
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| |
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| 0.516 ( should be 0.492) |
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|Cool down for at least 35 minutes before venting. |
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| |
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| Cool down for at least 35 minutes before venting. |
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|- |
|- |
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| |
|Pd |
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|6 (6, 7, 8) |
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| 1 |
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| |
|H |
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|12.0 |
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| 9 |
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|0.357 |
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| 12.0 |
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|112 |
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| 0.357 |
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| |
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| 140 |
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| |
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|- |
|- |
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| |
|Pt |
||
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|4 |
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| |
|C |
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|21.40 |
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| 8 |
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|0.245 |
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|100 |
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| 0.245 |
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|Prone to spitting. Evaporate at 1.5Å/sec or less. |
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| 140 |
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| Prone to spitting. Evaporate at 1.5Å/sec or less. |
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|- |
|- |
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|Ru |
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|(6, 7, 8) |
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| 1 |
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| |
|C |
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|12.362 |
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| 6 |
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|0.182 |
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| |
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| 0.182 |
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|Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting. |
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| 142 |
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| Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting. |
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|- |
|- |
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| |
|Si |
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|(6, 7, 8) |
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| 2 |
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|H |
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|2.32 |
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|0.712 |
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| |
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| 0.712 |
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|Cool down very slowly after evaporating lest you crack the source. |
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| 150 |
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| Cool down very slowly after evaporating lest you crack the source. |
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|- |
|- |
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| |
|SiO |
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|(6, 7, 8) |
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| |
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| |
|C |
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|2.13 |
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| 6 |
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|0.87 |
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| |
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| 0.87 |
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|'''Use only with permission''' |
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| 132 |
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| '''Use only with permission''' |
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|- |
|- |
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|SiO<sub>2</sub> |
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|(6, 7, 8) |
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| 1 |
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| |
|C |
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|2.648 |
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| 6 |
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|1.00 |
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| |
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| 1.00 |
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|'''Use only with permission.''' |
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| 140 |
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| '''Use only with permission.''' |
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Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table. |
Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table. |
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|- |
|- |
||
| |
|SrF<sub>2</sub> |
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|(6, 7, 8) |
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| 1 |
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| |
|C |
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|4.28 |
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| 6 |
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| |
|0.727 |
||
| |
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| 0.727 |
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|'''Use only with permission''' |
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| 140 |
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| '''Use only with permission''' |
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|- |
|- |
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| |
|Ta |
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|(6, 7, 8) |
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| 1 |
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|H |
||
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|16.6 |
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|0.262 |
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| |
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| 0.262 |
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|Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta. |
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| |
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| Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta. |
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|- |
|- |
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|W |
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|(6, 7, 8) |
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| 1 |
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|C |
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|19.3 |
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| 6 |
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|0.163 |
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| |
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| 0.163 |
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| |
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| 138 |
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| |
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|- |
|- |
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|Ti |
||
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|2 |
||
| |
|H |
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|4.50 |
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| 3 |
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|0.628 |
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|109 |
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| 0.628 |
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| |
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| 139 |
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| |
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|} |
|} |
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=[[E-Beam 2 (Custom)]]= |
=[[E-Beam 2 (Custom)]]= |
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==Materials Table (E-Beam #2)== |
==Materials Table (E-Beam #2)== |
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'''NOTE these recipes are outdated since gun upgrade 2020 - new data to be added soon.''' |
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{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
||
|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
||
! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Material''' |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Density, g/cm3''' |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Z Ratio''' |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Tooling factor, %''' |
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! width="100" |
! width="100" bgcolor="#D0E7FF" align="center" |'''Comments''' |
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|- |
|- |
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|Al<sub>2</sub>O<sub>3</sub> |
|Al<sub>2</sub>O<sub>3</sub> |
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Line 345: | Line 323: | ||
==ITO deposition (E-Beam 2)== |
==ITO deposition (E-Beam 2)== |
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*[[media:Rapid Thermal Annealing on Room-temperature grown ITO.pdf|Room-temperature ITO Deposition, Annealing, and Electrical and Optical Properties]] |
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*[[Media:Rapid Thermal Annealing on Room-temperature grown ITO.pdf|Room-temperature ITO Deposition, Annealing, and Electrical and Optical Properties]] |
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*[[media:ITO film-200C-O2-35sccm-EBeam2.pdf|ITO Deposition at 200 C]] |
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*[[Media:ITO film-200C-O2-35sccm-EBeam2.pdf|ITO Deposition at 200 C]] |
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==CeO<sub>2</sub> deposition (E-Beam 2)== |
==CeO<sub>2</sub> deposition (E-Beam 2)== |
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*[[media:CeO2 Deposition-EBeam2.pdf|Room- and High-temperature CeO<sub>2</sub> Depositions with and without an Additional Oxygen Gas Flow]] |
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*[[Media:CeO2 Deposition-EBeam2.pdf|Room- and High-temperature CeO<sub>2</sub> Depositions with and without an Additional Oxygen Gas Flow]] |
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=[[E-Beam 3 (Temescal)]]= |
=[[E-Beam 3 (Temescal)]]= |
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Line 357: | Line 337: | ||
|- |
|- |
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|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Material''' |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Gun''' |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Hearth /Crucible''' |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Process Gain, A/sec/%pwr''' |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Film Number''' |
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! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Density, g/cm3''' |
||
! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Z Ratio''' |
||
! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Tooling, %''' |
||
! width="100" |
! width="100" bgcolor="#D0E7FF" align="center" |'''Comments''' |
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|- |
|- |
||
| |
|Au |
||
| |
|Front |
||
| |
|C |
||
| |
|2.0 |
||
| |
|3 |
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|19.30 |
|19.30 |
||
| |
|0.381 |
||
| |
|56 |
||
| |
| |
||
|- |
|- |
||
| |
|Ni |
||
| |
|Front |
||
| |
|C |
||
| |
|0.5 |
||
| |
|2 |
||
|8.91 |
|8.91 |
||
| |
|0.331 |
||
| |
|67 |
||
| |
| |
||
|- |
|- |
||
| |
|Pt |
||
| |
|Front |
||
| |
|C |
||
| |
|0.4 |
||
| |
|1 |
||
|21.40 |
|21.40 |
||
| |
|0.245 |
||
| |
|67 |
||
| |
| |
||
|- |
|- |
||
| |
|Ti |
||
| |
|Front |
||
| |
|C |
||
| |
|5.0 |
||
| |
|4 |
||
|4.50 |
|4.50 |
||
| |
|0.628 |
||
| |
|67 |
||
| |
| |
||
|- |
|- |
||
|Ag |
|Ag |
||
| |
|Rear |
||
| |
|C |
||
| |
|10.0 |
||
| |
|2 |
||
|10.50 |
|10.50 |
||
| |
|0.529 |
||
| |
|67 |
||
| |
| |
||
|- |
|- |
||
| |
|Al |
||
| |
|Rear |
||
| |
|C |
||
| |
|10.0 |
||
| |
|1 |
||
|2.70 |
|2.70 |
||
| |
|1.080 |
||
| |
|53 |
||
| |
| |
||
|- |
|- |
||
| |
|Ge |
||
| |
|Rear |
||
| |
|C |
||
| |
|10.0 |
||
| |
|3 |
||
|5.35 |
|5.35 |
||
| |
|0.516 |
||
| |
|80 |
||
| |
| |
||
|- |
|- |
||
| |
|Pd |
||
| |
|Rear |
||
| |
|C |
||
| |
|0.9 |
||
| |
|4 |
||
|12.038 |
|12.038 |
||
| |
|0.357 |
||
| |
|48 |
||
| |
| |
||
|- |
|- |
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Line 453: | Line 433: | ||
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
||
|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
||
! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Material''' |
||
! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Density, g/cm3''' |
||
! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Z Ratio''' |
||
! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Master tooling, %''' |
||
! width="45" |
! width="45" bgcolor="#D0E7FF" align="center" |'''Process Gain, A/sec/%pwr''' |
||
! width="100" |
! width="100" bgcolor="#D0E7FF" align="center" |'''Comments''' |
||
|- |
|- |
||
|Ag |
|Ag |
||
| |
|10.50 |
||
| |
|0.529 |
||
|110 |
|110 |
||
|10.0 |
|10.0 |
||
Line 468: | Line 448: | ||
|- |
|- |
||
|Al |
|Al |
||
| |
|2.70 |
||
| |
|1.080 |
||
| |
|110 |
||
|6.0 |
|6.0 |
||
|updated 9/1/2021 |
|||
| |
|||
|- |
|- |
||
|Au |
|Au |
||
|19.30 |
|19.30 |
||
| |
|0.381 |
||
|120 |
|120 |
||
|10.0 |
|10.0 |
||
Line 483: | Line 463: | ||
|Co |
|Co |
||
|8.90 |
|8.90 |
||
| |
|0.343 |
||
|150 |
|150 |
||
|5.0 |
|5.0 |
||
Line 490: | Line 470: | ||
|Cr |
|Cr |
||
|7.20 |
|7.20 |
||
| |
|0.305 |
||
|140 |
|140 |
||
|10.0 |
|10.0 |
||
Line 497: | Line 477: | ||
|Fe |
|Fe |
||
|7.86 |
|7.86 |
||
| |
|0.349 |
||
|165 |
|165 |
||
|10.0 |
|10.0 |
||
Line 504: | Line 484: | ||
|Ge |
|Ge |
||
|5.35 |
|5.35 |
||
| |
|0.516 |
||
|126 |
|126 |
||
|10.0 |
|10.0 |
||
Line 511: | Line 491: | ||
|Hf |
|Hf |
||
|13.09 |
|13.09 |
||
| |
|0.360 |
||
|150 |
|150 |
||
|10.0 |
|10.0 |
||
Line 518: | Line 498: | ||
|Ir |
|Ir |
||
|22.40 |
|22.40 |
||
| |
|0.129 |
||
|130 |
|130 |
||
|10.0 |
|10.0 |
||
Line 525: | Line 505: | ||
|Ni |
|Ni |
||
|8.91 |
|8.91 |
||
| |
|0.331 |
||
|150 |
|150 |
||
|5.0 |
|5.0 |
||
Line 532: | Line 512: | ||
|NiCr |
|NiCr |
||
|8.50 |
|8.50 |
||
| |
|0.3258 |
||
|140 |
|140 |
||
|10.0 |
|10.0 |
Latest revision as of 18:59, 25 October 2022
Back to Vacuum Deposition Recipes.
Vapor Pressure Chart and Materials Deposition Table
Aluminum Deposition
E-Beam 1 (Sharon)
Ar-Ion Beam Source
Materials Table (E-Beam #1)
There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum. Now able to handle Four-4" wafers in one run.
Material | Position | Hearth / Crucible | Density | Z Ratio | Tooling | Comments | |
---|---|---|---|---|---|---|---|
Ag | 7 (6, 7, 8) | C | 10.5 | 0.529 | 110 | ||
Al | 1 | C | 2.7 | 1.080 | 102 | ||
Al2O3 | (6, 7, 8) | C | 3.97 | 0.336 | |||
Au | 3 | C | 19.3 | 0.381 | 92 | Bazookas can be used at 20-30Å/sec. | |
AuGe | (6, 7, 8) | C | 17.63 | 0.397 | Composition unpredictable unless you practically empty the crucible. | ||
C | (6, 7, 8) | H | 2.250 | 3.260 | Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission. | ||
Co | (6, 7, 8) | C | 8.9 | 0.343 | Use only with permission | ||
Fe | (6, 7, 8) | 7.86 | 0.349 | ||||
Ge | 8 (6, 7, 8) | C | 5.35 | 0.516 | |||
Gd | (6, 7, 8) | H | 7.89 | 0.670 | Use only with permission | ||
MgO | (6, 7, 8) | 3.58 | 0.411 | Use only with permission | |||
Mo | (6, 7, 8) | 10.2 | 0.257 | ||||
Ni | 5 | H | 8.91 | 0.331 | 104 | Prone to spitting. Cool down for 15 minutes before venting. | |
NiCr | (6, 7, 8) | H | 8.50 | 0.3258 | Density and z-ratio for Nichrome IV | ||
Nb | (6, 7, 8) | C | 8.57 | 0.516 ( should be 0.492) | Cool down for at least 35 minutes before venting. | ||
Pd | 6 (6, 7, 8) | H | 12.0 | 0.357 | 112 | ||
Pt | 4 | C | 21.40 | 0.245 | 100 | Prone to spitting. Evaporate at 1.5Å/sec or less. | |
Ru | (6, 7, 8) | C | 12.362 | 0.182 | Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting. | ||
Si | (6, 7, 8) | H | 2.32 | 0.712 | Cool down very slowly after evaporating lest you crack the source. | ||
SiO | (6, 7, 8) | C | 2.13 | 0.87 | Use only with permission | ||
SiO2 | (6, 7, 8) | C | 2.648 | 1.00 | Use only with permission.
Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table. | ||
SrF2 | (6, 7, 8) | C | 4.28 | 0.727 | Use only with permission | ||
Ta | (6, 7, 8) | H | 16.6 | 0.262 | Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta. | ||
W | (6, 7, 8) | C | 19.3 | 0.163 | |||
Ti | 2 | H | 4.50 | 0.628 | 109 |
E-Beam 2 (Custom)
Materials Table (E-Beam #2)
NOTE these recipes are outdated since gun upgrade 2020 - new data to be added soon.
Material | Density, g/cm3 | Z Ratio | Tooling factor, % | Comments |
---|---|---|---|---|
Al2O3 | 3.97 | 0.336 | 140.0 | Tony could you please check this? |
CeO2 | 7.13 | 1.000 | 252.0 | Deposition at room temperature (see the details in the following file) |
CeO2 | 7.13 | 1.000 | 117.0 | Deposition at 200 C (see the details in the following file) |
CeO2 | 7.13 | 1.000 | 99.7 | Deposition at 250 C (see the details in the following file) |
GeO2 | 6.24 | 1.000 | 139.0 | |
ITO | 6.43-7.14 | 1.000 | 139.0 | z ratio unknown |
MgO | 3.58 | 0.411 | 157.6 | OK |
Si | 2.32 | 0.712 | 150.0 | |
SiO2 | 2.648 | 1.000 | 157.6 | Density 2.2-2.7 according to thin film deposition tables |
SiOx | 2.13 | 0.87 | 130.0 | |
SrF2 | 4.28 | 0.727 | 140.0 | |
Ta2O5 | 8.2 | 0.30 | 157.6 | |
TiO2 | 4.26 | 0.400 | 139.0 |
ITO deposition (E-Beam 2)
- Room-temperature ITO Deposition, Annealing, and Electrical and Optical Properties
- ITO Deposition at 200 C
CeO2 deposition (E-Beam 2)
E-Beam 3 (Temescal)
Materials Table (E-Beam #3)
The following materials are always installed in the evaporator. There are 4 materials available on each gun (front/rear guns), allowing for co-deposition by running both guns simultaneously.
Material | Gun | Hearth /Crucible | Process Gain, A/sec/%pwr | Film Number | Density, g/cm3 | Z Ratio | Tooling, % | Comments |
---|---|---|---|---|---|---|---|---|
Au | Front | C | 2.0 | 3 | 19.30 | 0.381 | 56 | |
Ni | Front | C | 0.5 | 2 | 8.91 | 0.331 | 67 | |
Pt | Front | C | 0.4 | 1 | 21.40 | 0.245 | 67 | |
Ti | Front | C | 5.0 | 4 | 4.50 | 0.628 | 67 | |
Ag | Rear | C | 10.0 | 2 | 10.50 | 0.529 | 67 | |
Al | Rear | C | 10.0 | 1 | 2.70 | 1.080 | 53 | |
Ge | Rear | C | 10.0 | 3 | 5.35 | 0.516 | 80 | |
Pd | Rear | C | 0.9 | 4 | 12.038 | 0.357 | 48 |
E-Beam 4 (CHA)
Materials Table (E-Beam #4)
Material | Density, g/cm3 | Z Ratio | Master tooling, % | Process Gain, A/sec/%pwr | Comments |
---|---|---|---|---|---|
Ag | 10.50 | 0.529 | 110 | 10.0 | |
Al | 2.70 | 1.080 | 110 | 6.0 | updated 9/1/2021 |
Au | 19.30 | 0.381 | 120 | 10.0 | |
Co | 8.90 | 0.343 | 150 | 5.0 | |
Cr | 7.20 | 0.305 | 140 | 10.0 | |
Fe | 7.86 | 0.349 | 165 | 10.0 | |
Ge | 5.35 | 0.516 | 126 | 10.0 | |
Hf | 13.09 | 0.360 | 150 | 10.0 | |
Ir | 22.40 | 0.129 | 130 | 10.0 | |
Ni | 8.91 | 0.331 | 150 | 5.0 | |
NiCr | 8.50 | 0.3258 | 140 | 10.0 | density and z ratio for Nichrome IV |
NiFe | 8.70 | 1.000 | 100 | 10.0 | |
Pd | 12.038 | 0.357 | 112 | 10.0 | |
Pt | 21.40 | 0.245 | 130 | 10.0 | |
Ru | 12.362 | 0.182 | 100 | 10.0 | |
Ti | 4.50 | 0.628 | 183 | 10.0 | |
Zr | 6.49 | 0.600 | 150 | 10.0 |