High Temp Oven (Blue M): Difference between revisions
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|picture=BlueMOven.jpg |
|picture=BlueMOven.jpg |
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|type = Lithography |
|type = Lithography |
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|super= |
|super= Michael Barreraz |
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|super2= Aidan Hopkins |
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|location=Bay 5 |
|location=Bay 5 |
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|description = High Temperature Oven |
|description = High Temperature Oven |
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|manufacturer = Blue M Electric |
|manufacturer = Blue M Electric |
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|toolid=56 |
|toolid=56 |
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Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
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== Operating Procedures == |
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[https://wiki.nanotech.ucsb.edu/w/images/6/6c/BlueM_Instructions.pdf BlueM Oven Instructions] |
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Latest revision as of 08:14, 6 December 2025
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The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.