Difference between revisions of "Template:Announcements"
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+ | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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− | =====Feed-Test-VM-LIVE===== |
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+ | We have finished calibrations, |
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− | DESC-TEST-VM-LIVE |
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+ | System is up. |
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+ | |||
− | <!--feedBurner name="UCSBNanofab-Announcements" /--> |
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+ | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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− | <!-- Description of the RSS feed --> |
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+ | |||
− | '''''Important Announcements''''' |
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+ | //11:17, 24 May 2024 (PDT) |
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− | ---- |
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+ | |||
+ | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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+ | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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+ | |||
+ | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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+ | |||
+ | =====MA6 TSA is down - Update===== |
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+ | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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+ | |||
+ | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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+ | |||
+ | -Lee |
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+ | //15:59, 22 May 2024 (PDT) |
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+ | |||
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+ | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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+ | |||
+ | //[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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+ | |||
+ | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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+ | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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+ | |||
+ | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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+ | |||
+ | Sorry for the inconvenience. |
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+ | |||
+ | //[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
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+ | |||
+ | =====ICP1 Down===== |
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+ | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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+ | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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+ | |||
+ | =====Lab Access Changes: Symmetry App===== |
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+ | The iris scanner has been decommissioned. Please use the card reader which supports: |
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+ | |||
+ | -Physical card |
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+ | |||
+ | -Mobile phone via Symmetry App |
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+ | |||
+ | //10:54, 23 May 2024 (PDT) |
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+ | |||
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+ | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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+ | |||
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− | <!----------------------------------------------> |
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− | <!------------- Equipment Status ----------------> |
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− | All of the damaged parts have been repaired and we should receive them next week. I'm hopeful we'll have the system running by Thursday or Friday. -- Tony |
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− | // [[User:John d|John d]] 15:05, 27 January 2023 (PST) |
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− | |||
− | ===== Dektak XT in qualification ===== |
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− | We have replaced the Dektak 6M with a new Dektak XT profilometer. We are currently qualifying the tool, we'll send an email when it's ready for training. |
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− | // [[User:John d|John d]] 10:39, 25 January 2023 (PST) |
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− | Bath damaged, system is down for repair. |
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− | // [[User:John d|John d]] 08:48, 27 October 2022 (PDT) |
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− | <!---------- end of Equipment Status ------------> |
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====== HOW TO ADD ITEMS ====== |
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* Use level 5 heading for each item (5 equal signs surrounding the title) - they will show up as separate RSS items this way. (This looks best on the Wiki homepage) |
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Latest revision as of 11:17, 24 May 2024
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
//11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)