Template:Announcements: Difference between revisions

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=====FEI SEM#2 Replacement Project=====
=====Lab is OPEN=====
We completed our work early and the lab is now open for use.
The FEI SEM will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st.
-- Tony
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//[[User:Mehalana v|Vraj Mehalana]] 10:55, 16 March 2023 (PDT)
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//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
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<!------------- Equipment Status ---------------->


===== E-Beam #5: Down =====
=====Olympus DSX Microscope: Down=====
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
Chuck rotation motor damaged.
-- Tony Bosch
// [[User:Mehalana v|Vraj Mehalana]] 14:38, 13 March 2023 (PDT)
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// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)


===== ICP #1: Down =====
=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
One of the dry pumps is not getting power from the tool. We have located part of the problem but need to contact Panasonic for some guidance. Since tech support is in Japan, response time will be impacted. -- Lee Sawyer
Please plan your work accordingly.
// [[User:Mehalana v|Vraj Mehalana]] 12:36, 13 March 2023 (PDT)
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)


===== Unaxis Etch: Down =====
=====ICP #2 Maint: Complete=====
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony
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// [[User:John d|John d]] 09:35, 13 February 2023 (PST)


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
===== Dektak XT ready for training =====
We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please [[Aidan_Hopkins|contact the tool supervisor]].
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// [[User:John d|John d]] 10:08, 7 February 2023 (PST)


//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)
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===== Au Plating: UP=====
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues.
// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT)


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=====Oxford ALD+Ion Mill: UP=====
<!---------- end of Equipment Status ------------>
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks
Bill Millerski
UCSB
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)

=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]

// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)

=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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