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=====FEI SEM#2 Replacement Project=====
=====EBL Move-In: Tues 9-11a=====
Users,
The FEI SEM will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st.
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//[[User:Mehalana v|Vraj Mehalana]] 10:55, 16 March 2023 (PDT)
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Thank you for your patience while we moved the new EBL system in.
<!---------------------------------------------->
<!------------- Equipment Status ---------------->


The lab is fully open for use.
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===== E-Beam #5: Down =====
Chuck rotation motor damaged.
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// [[User:Mehalana v|Vraj Mehalana]] 14:38, 13 March 2023 (PDT)


Peder Lenvik
===== ICP #1: Down =====
One of the dry pumps is not getting power from the tool. We have located part of the problem but need to contact Panasonic for some guidance. Since tech support is in Japan, response time will be impacted. -- Lee Sawyer
Sr. Facilities Lead
// [[User:Mehalana v|Vraj Mehalana]] 12:36, 13 March 2023 (PDT)
// [[User:John_d|Demis D. John]] 23:47, 10 March 2025 (UTC)


===== Unaxis Etch: Down =====
=====MLA150 is UP=====
System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week.
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony
-Lee
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// [[User:John d|John d]] 09:35, 13 February 2023 (PST)
//[[User:John_d|Demis D. John]] 20:51, 7 March 2025 (UTC)


===== Dektak XT ready for training =====
=====Stepper #3 (ASML DUV) - Maint Complete =====
ASML Maintenance is complete, the system is up.
We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please [[Aidan_Hopkins|contact the tool supervisor]].
// [[User:John d|John d]] 10:08, 7 February 2023 (PST)
// [[User:John_d|Demis D. John]] 02:18, 7 March 2025 (UTC)


===== Au Plating: UP=====
=====RIE #5 Down: Mon March 13th =====
RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues.
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// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT)


If we complete the job early we will send a follow-up email releasing the system.
<!---------- end of Equipment Status ------------>

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//[[User:Mehalana v|Vraj Mehalana]] 09:46, 21 February 2025 (UTC)

=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]

// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)

=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
-Aidan
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// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

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=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

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Latest revision as of 19:15, 11 March 2025

EBL Move-In: Tues 9-11a

Users,

Thank you for your patience while we moved the new EBL system in.

The lab is fully open for use.

Peder Lenvik

Sr. Facilities Lead // Demis D. John 23:47, 10 March 2025 (UTC)

MLA150 is UP

System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. -Lee //Demis D. John 20:51, 7 March 2025 (UTC)

Stepper #3 (ASML DUV) - Maint Complete

ASML Maintenance is complete, the system is up. // Demis D. John 02:18, 7 March 2025 (UTC)

RIE #5 Down: Mon March 13th

RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.

If we complete the job early we will send a follow-up email releasing the system.

//Vraj Mehalana 09:46, 21 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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