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===== Raith EBL Update ===== |
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Unfortunately the fix discussed in the last update turned out to be a good news/bad news thing. The good news is that the majority of the field distortion problem we have experienced since the install has been addressed. However the bad news is that there is still a residual settling effect that is distorting the field in one part of the field only and prevents the tool from fully meeting specifications. So it turned out to a layers of an onion kind of thing – because of course it did. |
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The F50-WaferMapper’s laptop has been Replaced. |
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So the suspect now is the fine focus coil in the column (one of the factory engineers predicted stitch shifts when a faulty fine focus coil is present which essentially replicated the errors we are now seeing) and the question now is how to get one of these sent to UCSB. They are a factory install item so for us to get one, and one that has been tested and confirmed to be fully operational, would require it to be taken from a tool currently under fabrication on the production line. |
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=====FEI SEM#1 Replacement Project===== |
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The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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We are close, very close, but still not quite there. And I am really sorry that is still the case… |
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//[[User:Mehalana v|Vraj Mehalana]] 10:55, 16 March 2023 (PDT) |
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-Bill |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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-- Vraj |
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=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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I will send out an update once we have one. |
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-Aidan |
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// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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<!------------- Equipment Status ----------------> |
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We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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===== Dektak XT ready for training ===== |
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We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please [[Aidan_Hopkins|contact the tool supervisor]]. |
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===== Au Plating: UP===== |
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only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
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Latest revision as of 22:53, 13 June 2025
Raith EBL Update
Unfortunately the fix discussed in the last update turned out to be a good news/bad news thing. The good news is that the majority of the field distortion problem we have experienced since the install has been addressed. However the bad news is that there is still a residual settling effect that is distorting the field in one part of the field only and prevents the tool from fully meeting specifications. So it turned out to a layers of an onion kind of thing – because of course it did.
So the suspect now is the fine focus coil in the column (one of the factory engineers predicted stitch shifts when a faulty fine focus coil is present which essentially replicated the errors we are now seeing) and the question now is how to get one of these sent to UCSB. They are a factory install item so for us to get one, and one that has been tested and confirmed to be fully operational, would require it to be taken from a tool currently under fabrication on the production line.
We are close, very close, but still not quite there. And I am really sorry that is still the case… -Bill // Demis D. John 22:53, 13 June 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)