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=====Stepper #3 (ASML DUV) - Maintenance April 10th week===== |
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=====Christmas Lab Shutdown: Dec 22-25===== |
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ASML engineers will be performing periodic maintenance the week of April 10th. |
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Users, |
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Please plan for the system to be down ~10a Monday April 10th, until Friday that week. |
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To perform annual maintenance, we are planning to have the lab shut down from '''''9 am on Monday December 22 through 9 am Friday December 26th'''''. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:17, 4 April 2023 (PDT) |
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=====FEI SEM#1 Replacement Project===== |
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Please plan accordingly. |
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The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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- Peder Lenvik |
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//[[User:Mehalana v|Vraj Mehalana]] 10:55, 16 March 2023 (PDT) |
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// [[User:John_d|Demis D. John]] 02:03, 27 November 2025 (UTC) |
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<!--feedBurner name="UCSBNanofab-Announcements" /--> |
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=====Announcements moved===== |
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Please check the announcements in SignupMonkey for equipment notifications. |
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// [[User:John_d|Demis D. John]] 02:03, 27 November 2025 (UTC) |
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<!------------- Equipment Status ----------------> |
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===== Unaxis Etch: Down ===== |
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We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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// [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
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===== Au Plating: UP===== |
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only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
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Latest revision as of 06:39, 3 December 2025
Christmas Lab Shutdown: Dec 22-25
Users, To perform annual maintenance, we are planning to have the lab shut down from 9 am on Monday December 22 through 9 am Friday December 26th.
Please plan accordingly. - Peder Lenvik // Demis D. John 02:03, 27 November 2025 (UTC)
Announcements moved
Please check the announcements in SignupMonkey for equipment notifications. // Demis D. John 02:03, 27 November 2025 (UTC)