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=====Oxford Flexal ALD===== |
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=====Stepper #3 (ASML DUV) - Maintenance April 10th week===== |
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The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday. |
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ASML engineers will be performing periodic maintenance the week of April 10th. |
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Please plan for the system to be down ~10a Monday April 10th, until Friday that week. |
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Sorry for any inconvenience this may cause. |
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=====FEI SEM#1 Replacement Project===== |
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Thanks |
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The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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Bill Millerski |
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//[[User:Mehalana v|Vraj Mehalana]] |
//[[User:Mehalana v|Vraj Mehalana]] 21:12, 12 August 2025 (UTC) |
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=====Suss SB6-8E===== |
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This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information. |
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// [[User:John_d|Demis D. John]] 04:28, 5 August 2025 (UTC) |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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// [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
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===== Au Plating: UP===== |
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only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
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Latest revision as of 22:24, 13 August 2025
Oxford Flexal ALD
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.
Sorry for any inconvenience this may cause.
Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)
Suss SB6-8E
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)