Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====Stepper #3 (ASML DUV) - Tool down===== |
| + | Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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| − | We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
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| + | Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT) |
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| − | =====Wafer Coater (S Cubed Flexi) - S3 field service===== |
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| − | S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. |
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| + | =====MLA Service Complete===== |
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| + | The FSE has completed their work. |
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| − | =====FEI SEM#1 Replacement Project===== |
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| − | The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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| + | I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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| − | <!--feedBurner name="UCSBNanofab-Announcements" /--> |
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| + | Tool is available to use. |
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| − | <!-- Description of the RSS feed --> |
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| + | -Lee // [[User:John_d|Demis D. John]] 17:46, 2 October 2024 (PDT) |
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| + | =====Suss SB6-8E===== |
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| + | When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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| + | -Aidan |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | -Physical card |
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| + | -Mobile phone via Symmetry App |
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| − | <!----------------------------------------------> |
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| − | <!------------- Equipment Status ----------------> |
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| − | We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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| − | // [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
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| − | ===== Au Plating: UP===== |
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| − | only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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| − | // [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
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| − | <!---------- end of Equipment Status ------------> |
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Latest revision as of 18:36, 3 October 2024
Stepper #3 (ASML DUV) - Tool down
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.
Unfortunately, we cannot initialize the stage at this time. System is down. // Vraj Mehalana 18:36, 3 October 2024 (PDT)
MLA Service Complete
The FSE has completed their work.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.
Tool is available to use.
-Lee // Demis D. John 17:46, 2 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)