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=====Oxford Flexal ALD===== |
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The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday. |
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We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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Sorry for any inconvenience this may cause. |
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Thanks |
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Bill Millerski |
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=====Suss SB6-8E===== |
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This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information. |
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// [[User:John_d|Demis D. John]] 04:28, 5 August 2025 (UTC) |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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Runs will still require Staff supervision until then. |
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=====E-Beam #4 (CHA) - EB4 is down===== |
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We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:26, 28 April 2023 (PDT) |
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=====Wafer Coater (S Cubed Flexi) - S3 field service===== |
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S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. |
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//[[User:Mehalana v|Vraj Mehalana]] 13:54, 28 April 2023 (PDT) |
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=====FEI SEM#1 Replacement Project===== |
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The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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// [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
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===== Au Plating: UP===== |
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only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
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Latest revision as of 22:24, 13 August 2025
Oxford Flexal ALD
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.
Sorry for any inconvenience this may cause.
Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)
Suss SB6-8E
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)