Template:Announcements: Difference between revisions
Jump to navigation
Jump to search
Content deleted Content added
Mehalana v (talk | contribs) No edit summary |
mNo edit summary |
||
| (317 intermediate revisions by 7 users not shown) | |||
| Line 1: | Line 1: | ||
<startfeed /> |
<startfeed /> |
||
=====NanoFan Lab is UP===== |
|||
=====Christmas Lab Shutdown: Dec 22-25===== |
|||
The cleanroom is back up and running and you are welcomed back into the lab. Please check your emails for individual equipment status. Sorry for the inconvenience. |
|||
Users, |
|||
//11:32, 14 June 2023 (PDT) |
|||
To perform annual maintenance, we are planning to have the lab shut down from '''''9 am on Monday December 22 through 9 am Friday December 26th'''''. |
|||
=====Unaxis ICP-PECVD is DOWN===== |
|||
I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
|||
Please plan accordingly. |
|||
Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-Tony |
|||
- Peder Lenvik |
|||
//[[User:Mehalana v|Vraj Mehalana]] 09:25, 30 May 2023 (PDT) |
|||
// [[User:John_d|Demis D. John]] 02:03, 27 November 2025 (UTC) |
|||
=====Plasma Activation (EVG 810)===== |
|||
We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
|||
=====Announcements moved===== |
|||
Runs will still require Staff supervision until then. |
|||
Please check the announcements in SignupMonkey for equipment notifications. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 18:01, 2 May 2023 (PDT) |
|||
// [[User:John_d|Demis D. John]] 02:03, 27 November 2025 (UTC) |
|||
<!-- |
<!-- |
||
| Line 18: | Line 19: | ||
>> Use two slashes // and FOUR tilde's to insert your signature at the end of your post: //~~~~ |
>> Use two slashes // and FOUR tilde's to insert your signature at the end of your post: //~~~~ |
||
--> |
--> |
||
<!----------------------------------------------> |
|||
<!------------- Equipment Status ----------------> |
|||
<!---------- end of Equipment Status ------------> |
|||
<!---------DO NOT EDIT BELOW THIS LINE-----------> |
<!---------DO NOT EDIT BELOW THIS LINE-----------> |
||
<endfeed /> |
<endfeed /> |
||
Latest revision as of 06:39, 3 December 2025
Christmas Lab Shutdown: Dec 22-25
Users, To perform annual maintenance, we are planning to have the lab shut down from 9 am on Monday December 22 through 9 am Friday December 26th.
Please plan accordingly. - Peder Lenvik // Demis D. John 02:03, 27 November 2025 (UTC)
Announcements moved
Please check the announcements in SignupMonkey for equipment notifications. // Demis D. John 02:03, 27 November 2025 (UTC)