Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====MA6 is up===== |
| − | The cleanroom is back up and running and you are welcomed back into the lab. Please check your emails for individual equipment status. Sorry for the inconvenience. |
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| + | JEOL Service will be here tomorrow morning to look at the situation. They had me try a couple of things today that didn't work. It is pointing to a gun replacement at this point. They do a have a spare gun at the JEOL facility in Pittsburgh ready to go if needed. |
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| − | //11:32, 14 June 2023 (PDT) |
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| − | I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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| − | Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-Tony |
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| + | =====(JEOL JBX-6300FS) System is UP===== |
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| − | =====Plasma Activation (EVG 810)===== |
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| − | We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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| − | Runs will still require Staff supervision until then. |
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| + | =====MLA Maintenance 6/24-6/27===== |
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| + | The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the |
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| + | evenings. |
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| + | -Lee |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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| + | =====Stepper #1 (GCA 6300) - Tool availability===== |
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| + | Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times: |
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| + | |||
| + | 6-18-24 at 8:00am |
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| + | Till |
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| + | 6-20-24 at 5:00pm |
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| + | |||
| + | Please plan your processing activities accordingly. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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| + | |||
| + | =====Stepper #2 (GCA Autostep 200) - Tool availability===== |
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| + | Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times: |
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| + | |||
| + | 6-21-24 at 8:00am |
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| + | Till |
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| + | 6-21-24 at 5:00pm |
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| + | |||
| + | Please plan your processing activities accordingly. |
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| + | |||
| + | Thanks |
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| + | Bill Millerski |
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| + | UCSB |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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| + | =====ICP1 Down===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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| + | |||
| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 17:01, 14 June 2024
MA6 is up
JEOL Service will be here tomorrow morning to look at the situation. They had me try a couple of things today that didn't work. It is pointing to a gun replacement at this point. They do a have a spare gun at the JEOL facility in Pittsburgh ready to go if needed.
//Vraj Mehalana 16:59, 14 June 2024 (PDT)
(JEOL JBX-6300FS) System is UP
//Vraj Mehalana 16:59, 14 June 2024 (PDT)
MLA Maintenance 6/24-6/27
The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the evenings. -Lee //Vraj Mehalana 16:59, 14 June 2024 (PDT)
Stepper #1 (GCA 6300) - Tool availability
Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times:
6-18-24 at 8:00am Till 6-20-24 at 5:00pm
Please plan your processing activities accordingly. //Vraj Mehalana 16:59, 14 June 2024 (PDT)
Stepper #2 (GCA Autostep 200) - Tool availability
Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times:
6-21-24 at 8:00am Till 6-21-24 at 5:00pm
Please plan your processing activities accordingly.
Thanks Bill Millerski UCSB //Vraj Mehalana 16:59, 14 June 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)