Template:Announcements: Difference between revisions
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!===== |
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We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. |
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The cleanroom is back up and running and you are welcomed back into the lab. Please check your emails for individual equipment status. Sorry for the inconvenience. |
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//11:32, 14 June 2023 (PDT) |
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=====Unaxis ICP-PECVD is DOWN===== |
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I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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Raith service has resolved all issues with the Velion FIB and the tool is up and available for general use. Work to align and calibrate all relevant column modes will begin the week starting May 12th.// [[User:John_d|Demis D. John]] 22:38, 13 May 2025 (UTC) |
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Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-Tony |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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Runs will still require Staff supervision until then. |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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-- Vraj |
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// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC) |
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=====New Gowns: Toolbelts purchases===== |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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I will send out an update once we have one. |
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-Aidan |
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// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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Latest revision as of 17:55, 22 May 2025
Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!
We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. // Vraj Mehalana 21:48, 21 May 2025 (UTC)
Raith Velion UP
Raith service has resolved all issues with the Velion FIB and the tool is up and available for general use. Work to align and calibrate all relevant column modes will begin the week starting May 12th.// Demis D. John 22:38, 13 May 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)