Difference between revisions of "Template:Announcements"

Latest revision as of 11:17, 24 May 2024

Stepper #3 (ASML DUV) - System UP and calibrated

We have finished calibrations, System is up.

Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.

//11:17, 24 May 2024 (PDT)

Atomic Force Microscope (Dimension ICON) - 05/17: System UP

Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!

//Vraj Mehalana 13:46, 20 May 2024 (PDT)

MA6 TSA is down - Update

We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.

The tool remains up for backside alignment and topside exposures that do not require alignment.

-Lee //15:59, 22 May 2024 (PDT)

Velion FIB Tool DOWN

Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.

//Vraj Mehalana 10:58, 30 April 2024 (PDT)

Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics

We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.

Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.

Sorry for the inconvenience.

//Vraj Mehalana 19:04, 21 May 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//10:54, 23 May 2024 (PDT)

Wafer Bonder, (Suss SB6-8E)

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)

@@ Line 1: / Line 1: @@
 <startfeed />
-=====Field Emission SEM #2 (JEOL 7600F) - IMPORTANT=====
+=====Stepper #3 (ASML DUV) - System UP and calibrated=====
+We have finished calibrations,
-We will be decommissioning the 7600F on Friday, July 7th at 8am and replacing it with a new JEOL IT800.  The installation of the new SEM should take 2-3 weeks.
+System is up.
-//[[User:Mehalana v|Vraj Mehalana]] 11:35, 29 June 2023 (PDT)
-=====Plasma Activation (EVG 810)=====
+Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
-We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything.
-Runs will still require Staff supervision until then.
-//[[User:Mehalana v|Vraj Mehalana]] 18:01, 2 May 2023 (PDT)
+//11:17, 24 May 2024 (PDT)
+=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP=====
+Head was repaired and returned today.  A quick test showed correct performance.  Note also that the pin board has been repaired so all 4 pins are now present.  Lets keep it that way so please be careful when loading the tip holder!
+//[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT)
+=====MA6 TSA is down - Update=====
+We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
+The tool remains up for backside alignment and topside exposures that do not require alignment.
+-Lee
+//15:59, 22 May 2024 (PDT)
+=====Velion FIB Tool DOWN=====
+Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
+//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT)
+=====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics=====
+We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
+Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
+Sorry for the inconvenience.
+//[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT)
+=====ICP1 Down=====
+The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
+//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
+=====Lab Access Changes: Symmetry App=====
+The iris scanner has been decommissioned. Please use the card reader which supports:
+-Physical card
+-Mobile phone via Symmetry App
+//10:54, 23 May 2024 (PDT)
+=====Wafer Bonder, (Suss SB6-8E)=====
+SUSS aims to be on site in early February.  We’ll will send out an email once I get confirmation for a specific date.
+//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)
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