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=====Oxford Flexal ALD=====
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.


Sorry for any inconvenience this may cause.
=====Dicing Saw (ADT) Upgrade 10/9=====
The dicing saw is scheduled go down for an upgrade on Monday October 9th and will be down for that week and into the weekend. Part of the upgrade will be updated software and will require users to be re-trained. I will provide more info on the re-training once I get a little hands on time with the updated software.
I'll send out a couple of reminder emails between now and then and keep everyone updated in the event the schedule for this changes.
//[[User:Mehalana v|Vraj Mehalana]] 10:33, 6 September 2023 (PDT)


Thanks
=====Stepper #1 (GCA 6300) Scheduled Maintenance=====
Bill Millerski
The tool has been scheduled for maintenance on 9-28-23 from 8:00am to 5:00pm. During this time the tool will be unavailable for use. Please plan your lab activities accordingly.
//[[User:Mehalana v|Vraj Mehalana]] 10:13, 6 September 2023 (PDT)
//[[User:Mehalana v|Vraj Mehalana]] 21:12, 12 August 2025 (UTC)


=====SEM 2 is Up=====
=====Suss SB6-8E=====
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information.
JEOL has finished will the install and the SEM is available to use if you've received training on SEM #1.
//[[User:Hopkins a|Hopkins a]] 15:32, 29 August 2023 (PDT)
// [[User:John_d|Demis D. John]] 04:28, 5 August 2025 (UTC)


=====Plasma Activation (EVG 810)=====
=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
We will have an FSE onsite to install the new parts on the tool and verify it is operating correctly. I don't expect this to take more than a few days, but plan for the tool to be down all week.
//[[User:Mehalana v|Vraj Mehalana]] 10:27, 15 September 2023 (PDT)
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


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Latest revision as of 22:24, 13 August 2025

Oxford Flexal ALD

The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.

Sorry for any inconvenience this may cause.

Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)

Suss SB6-8E

This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)